3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R)lMl01 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire length) 300 300 120.5<122.5> 108<110> (Lead wire length) 60<61> 54<55> Indicator light 49<52.5> 54<59> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23mm2 < >: AC <

CM2

Please delete the unnecessary part. 1.4-15 Standard: Double Acting Single Rod Series CM2 Front Trunnion (U) CM2U Bore size Stroke CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) E 20 26 26 32 Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 P 1/8 1/8 1/8 1/4 Bore size 20 25 32 40 K 5 5.5 5.5 7 N 15 15 15 21.5 B2 26 32 32 41 D 8 10 12 14 I 28 33.5 37.5 46.5 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14

CM2

Z + Stroke ZZ + Stroke LZ + Stroke 2-Rc P Width across flats B1 Refer to p. 6-4-22 for details of clevis pivot bracket.

MGP

300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38 42 35 50 to 124st 45 46 48 50 54 47 125

VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M3: 0.8 Nm 61 Series SYJ7000 Type 20: Top Proted/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75

1

st Over 300 st Over 25 st to 100 st 25 st Over 100 st to 200 st Over 200 st to 300 st Over 300 st Over 25 st to 100 st Over 100 st to 200 st 25 st Over 300 st Over 25 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 25 st or less Over 300 st Over 30 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 30 st or less Over 300 st Over 25 st to 100 st Over 100 st to 200 st Over 200

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(L) M plug connector (M) 117 (3 Position) <119> 129 (3 Position) <131> 300 (Lead wire length) 54.5 <59.5> 300 (Lead wire length) 108 (Double) <110> 120.5 (Double) <122.5> 76 (Single metal seal) <77> 82 (Single metal seal) <83> 73.5 (Single rubber seal) <74.5> 80 (Single rubber seal) <81> 54 <55> 60 <61> 49 <52.5> 1 P Cover diameter 1.5 Cross section 0.23mm2 1 P Cover diameter 1.5 Cross

100

[kPa] Max. suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Weight*6 [g] Page ZL1 84 100 57 180 p. 7 ZL3 93*4 300*5 135*4 390 p. 19 *4 ZL3H, ZL6H (Standard supply pressure: 0.5 MPa) *5 Branch + Port exhaust *6 Basic type ZL6 93*4 600*5 270*4 470 p. 19 ZL1/ZL3/ZL6 Series CAT.ES100-108B A Multistage Ejector ZL1/ZL3/ZL6 Series Energy saving Suction: 100 L Suction: 300 L Suction

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc(PT)1/4 P(SUP) port 2-Rc(PT)1/4 R(EXH) port 21 10 41 DIN terminal (Y) L plug connector (L) 300 (Lead wire) 88.5 89.5 Indicator light Pg.7 92.5 MAX.10 Indicator light 56 59.5 R 3 1 P Cover dia 1.5 Cross section

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

About 300 31.1 B B 54.6 [61.1] About 300 15 12 A A (Lead wire length) 1 3 2n-M3 0.5 14.5 (Pitch) P=10.5 (A, B port) [ ] for AC Other dimensions are the same as the grommet type.

0.4

q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4(A) 2(B) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

17 23 For M5 Manual override 10.5 (Pitch) P=16 18 1 20.5 10.5 35 (DIN 36.2) R P P R 57.1 [59.3] 35 (DIN 36.2) 21.5 R P P R 57.1 [59.3] 38 2-5.5 (For mounting) 2-5.5 (For mounting) 1/8 (P, R port) Approx. 300 (Lead wire length) L1 L2 Manual override 4.5 L1 L2 4.5 Approx. 300 (Lead wire length) (Station n) (Station 1) (Station n) (Station 1) (Light/surge voltage suppressor) 54.1 [61.1] + +