Actuation Type: -, Sealant: -, Function: -, Voltage: -, Light & Surge Suppressor: -, Manual Override: -, Protection: -, 1: -, Piping Specification: -, Port Size: -, Thread: -, Composite Symbol: -

Actuation Type: -, Sealant: -, Function: -, Voltage: -, Light & Surge Suppressor: -, Manual Override: -, Protection: -, 1: -, Piping Specification: -, Port Size: -, Thread: -, Composite Symbol: -

Actuation Type: -, Sealant: -, Function: -, Voltage: -, Light & Surge Suppressor: -, Manual Override: -, Protection: -, 1: -, Piping Specification: -, Port Size: -, Thread: -, Composite Symbol: -

Actuation Type: -, Sealant: -, Function: -, Voltage: -, Light & Surge Suppressor: -, Manual Override: -, Protection: -, 1: -, Piping Specification: -, Port Size: -, Thread: -, Composite Symbol: -

Actuation Type: -, Sealant: -, Function: -, Voltage: -, Light & Surge Suppressor: -, Manual Override: -, Protection: -, 1: -, Piping Specification: -, Port Size: -, Thread: -, Composite Symbol: -

Actuation Type: -, Sealant: -, Function: -, Voltage: -, Light & Surge Suppressor: -, Manual Override: -, Protection: -, 1: -, Piping Specification: -, Port Size: -, Thread: -, Composite Symbol: -

Function 1: Single, Sealant: Metal Seal, Function 2: Standard (1W DC, AC), Coil Voltage: 100VAC 50/60Hz, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style, Enclosure: IP65 Protection Compatible, Sub-plate: -, Thread: -

Function 1: Double, Sealant: Metal Seal, Function 2: Standard (1W DC, AC), Coil Voltage: 100VAC 50/60Hz, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style, Enclosure: IP65 Protection Compatible, Sub-plate: -, Thread: -

Function 1: Closed Center, Sealant: Metal Seal, Function 2: Standard (1W DC, AC), Coil Voltage: 100VAC 50/60Hz, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style, Enclosure: IP65 Protection Compatible, Sub-plate: -, Thread: -

Table of Contents

to 100 MGPL32 to 100 i !

MG

to 100 MGPL32 to 100 i !

LEC-OM02704CN

60 70 1000 1 5 1000 2000 80 80 0 0 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 8 1000 1000 100 100 0 0 LEC-MR-J3BAT 1000 1000 100 100 0 0 C N 4 ( 3 ) 255 2000 2000 80 80 0 0 RS-422 USB CN 6 CN 1 CN3 CN5 DI/O ON USB CC-Link RS-422 1.

7

9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

3

DC Specification AC Specification (Built-in Full-wave Rectifier Type) Model Power consumption (W) Note 1) Temperature rise (C) Note 2) Model Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) VXS23/24 12 100 VXS25/26 15 100 VXS23/24 12 100 VXS25/26 15 100 Note 1) The value at ambient temperature of 20C and when the rated voltage is applied.

LECP6_C

20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - TB No.

ZQ-OM01401

30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15 -40 -40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR)

LECA6_C

50.00 1000 1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () No.1(IN0ON) DRIVEON No.1 DRIVE No.

Vacuum

ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $en ) Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!

Vacuum

ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $enie Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!