V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

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size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

Electric Actuator with Integrated Guide

17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6ENF100--X10 LTF6ENF200--X10 LTF6ENF300--X10 LTF6ENF400--X10 LTF6ENF500--X10 LTF6ENF600--X10 2 3 4 5 6 7 1.

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0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

CA2

n = 2, 4, 6, 8 Same side 15 90 100 110 35 75 80 90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35

MY1

A MY-S63A 2-17.5 10.5 18.3 18.3 2-11.5 A B 70 100 Side support B MY-S63B 2-M12 x 1.75 70 100 A B Dimensions (mm) Model A Applicable cylinder B 284 314 304 MY1HT50 MY-S63A B 334 MY1HT63 Guide for Using Side Supports W kg For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load weight.

CV/MVGQ

) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8

CV/MVGQ

2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side RS H A 15 90 100 110 35 100 100 100 100 1 Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2,

MY1

) (Hexagon socket head plug) MY1BG MY1BG VV VV 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C E GA GB H KK J LD L LL LW M MM N NC Model G JJ K NE 80 6 3.5 2 9 16 37 6.5 M5 x 0.8 3.5 80 40 30 6 M4 x 0.7 20 14 MY1B16 14 M4 x 0.7 10 27.8 100 7.5 4.5 2 12.5 17.5 46 10 M6 x 1 4.5 100 50 37 8 M5 x 0.8 25 17.5 MY1B20 12.5 M4 x 0.7 12 34 (mm) NW PC PD T VV

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For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !6 Internal rubber bumper q !4 q !0 Internal rubber bumper !1 !1 o !

ISO Cylinder

A B A B A B 8 6.5 6.5 2 2 3 3 A B A B A B A B A B 8 5 5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3]

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !6 Internal rubber bumper q !4 q !0 Internal rubber bumper !1 !1 o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !6 Internal rubber bumper q !4 q !0 Internal rubber bumper !1 !1 o !

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For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

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Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1 4/2 (P A/B) Flow characteristics (4) Weight (kg) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] VF3122--01-F 2 position single 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 2 position single 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Air Cylinder

Flange: CG1WFl F FT 4 x FD FX0.15 B E 0 0.05 B FX0.15 H (mm) Bore size Stroke range B E F FX FD FT H 20 Up to 1500 40 12 2 28 5.5 6 35 25 Up to 1500 44 14 2 32 5.5 7 40 32 Up to 1500 53 18 2 38 6.6 7 40 40 Up to 1500 61 25 2 46 6.6 8 50 50 Up to 1500 76 30 2 58 9 9 58 63 Up to 1500 92 32 2 70 11 9 58 80 Up to 1500 104 40 3 82 11 11 71 100 Up to 1500 128 50 3 100 14 14 71 * End boss is machined

CRB2/CRBU2/CRB1

Change 2 threaded holes on Body (B) into through holes.

Air Cylinder

MB1 D-B59W 15 20 75 20 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-G39A Note 4) D-K39A D-A3lA D-A44A 10 35 100 35 + 30 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 3, 4, 5) CA2 CS1 CS2 Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.