Cylinder with Lock

2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4, 6, 8)1 105 + 100 (n 2) (n = 2, 4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface) n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 D-A44 n

MNB

side) 1 10 60 65 75 80 85 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different

MNB

side) 1 10 60 65 75 80 85 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

CL

75 10 Rod Boot Material 75 + 55 (n 2) n 2 2 20 + 50 ( ) (n = 2, 4, 6) D-B59W 20 75 15 Symbol Rod boot material Maximum ambient temperature D-A3A D-G39A D-K39A D-A44A 70C Nylon tarpaulin J 35 + 30 (n 2) 35 100 100 + 100 (n 2) 10 110C Heat resistant tarpaulin K Maximum ambient temperature for the rod boot itself. 9-2-18 17 Series CLM2 Fine Lock Cylinder Double Acting, Single Rod Mounting

V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

15

Body side hub, spider u PP (Mounting distance) Actuator Motor flange B details Component Parts 2 x FA No.

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

CQS

A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35.3 35.3 41.2 44.7 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 A + Stroke LS + Stroke CUJ Bore size (mm) L Y X LZ LY LX LT LH LG L1 LD CU 12 16 20 25 4.5 5 5.8 5.8 8 8 9.2 10.7 44 48 62 66 29.5 33.5 42 46 34 38 48 52 2 2

CLQ

switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100

CHKD/CHKG

mm stroke For 100 mm stroke For 125 mm stroke For 150 mm stroke For 75 mm stroke For 100 mm stroke For 125 mm stroke For 150 mm stroke For 175 mm stroke 32 40 50 63 80 100 Dimensions CHKGB--XC63 Stroke Bore size (mm) 55, 60, 65, 70 80, 85, 90, 95 105, 110, 115, 120 130, 135, 140, 145 155, 160, 165, 170 Dimensions A B A B A B A B A B 32 141 131 166 156 191 181 216 206 40 150 140 175 165

ISO Cylinder

A B A B A B 8 6.5 6.5 2 2 3 3 A B A B A B A B A B 8 5 5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3]

ZP

J 04 4 06 6 08 8 Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

MXS Series Air Slide Table

2 2 2 2 2 4 4 4 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 125 173 223

Modular Design with Uniform Body Style

For the AW60(K)-D, the assembly consists of a bracket A/B and 2 mounting screws.

CLQ

: 32 to 100 Type A Mounting Bracket 2-D T1 T2 M W V CL U CL1 MLGC F B E CNG Joint and Mounting Bracket (Type A, Type B) Part No.

Compact Cylinder with Lock Series CLQ

switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 75 15 85 75 90 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 75 + 40 90 + 40 15 + 40 75 + 40 80 + 40 85 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Table of Contents

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !