High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Table of Contents

60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 60 10 40 MHC 60 MHT 16 40 MHY 60 MHW 20 40 MRHQ 60 25 Misc. 40 30 D32 20 2030 40 P . 12-4-7 20 Note) The open and close time spans represent the value when the exterior of the workpiece is being held.

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch model Applicable load IC circuit, Relay, PLC Load voltage 48 V or less 100 V or less 24 V or less AC DC AC DC AC DC Maximum load current 40 mA 20 mA 50 mA Contact protection circuit None Internal resistance D-A93,

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch model Applicable load IC circuit, Relay, PLC Load voltage 48 V or less 100 V or less 24 V or less AC DC AC DC AC DC Maximum load current 40 mA 20 mA 50 mA Contact protection circuit None Internal resistance D-A93,

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch model Applicable load IC circuit, Relay, PLC Load voltage 48 V or less 100 V or less 24 V or less AC DC AC DC AC DC Maximum load current 40 mA 20 mA 50 mA Contact protection circuit None Internal resistance D-A93,

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch model Applicable load IC circuit, Relay, PLC Load voltage 48 V or less 100 V or less 24 V or less AC DC AC DC AC DC Maximum load current 40 mA 20 mA 50 mA Contact protection circuit None Internal resistance D-A93,

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch model Applicable load IC circuit, Relay, PLC Load voltage 48 V or less 100 V or less 24 V or less AC DC AC DC AC DC Maximum load current 40 mA 20 mA 50 mA Contact protection circuit None Internal resistance D-A93,

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch model Applicable load IC circuit, Relay, PLC Load voltage 48 V or less 100 V or less 24 V or less AC DC AC DC AC DC Maximum load current 40 mA 20 mA 50 mA Contact protection circuit None Internal resistance D-A93,

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch model CUJ Applicable load IC circuit, Relay, PLC CU Load voltage 48 V or less 100 V or less 24 V or less AC DC AC DC AC DC Maximum load current 40 mA 20 mA 50 mA CQS Contact protection circuit None Internal resistance

Hydraulic

x 1.0 30 +0.1 0 50 40 M8 x 1.25 185 145 57 79 M48 x 1.5 76 40 H -0.1 -0.4 D +0.07 0 25 16 M5 x 0.8 76 60 25 32 M16 x 1.5 26 16 +0.084 0 31.5 20 M5 x 0.8 90 70 30 40 M20 x 1.5 31 20 C +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M24 x 1.5 40 30 C-series K B +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M30 x 1.5 50 30 A +0.1 0 50 40 M8 x 1.25 185 145 57 79 M39 x 1.5 63 40 Double knuckle joint Material:

5

(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

e-Rodless Actuator

(A clearance of 40 or more is required.) (60) (74.7) 101.7 60 (40) 80 40 74.7 27 27 4H7 depth 5 Motor 72 43.5 50 42 60 102 102 50.4 40 5 5.1 40 3.5 40 Long hole depth 5 Controller 4 15.5 6 7.2 5.6 (Max. 8.6) 14.4 6.5 4H7 2-6.5 counterbore depth 3.3 28 (60.3) 87.3 2 x 2-3.3 through hole 4 152 + Stroke 4-M4 x 0.7 depth 7 FG terminal M3 T-slot section for mounting I/O cable (9 wires) 5.8 3.5

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

Rotary Table/

(Lm/2) 190 40 10 40 10 10 35 10 190 35 Most sensitive position Operating range of single auto switch Lm Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

Table of Contents

x 1.5 Up to 700 1/8 146 9 10 40 40 60 196 206 20 42.5 40 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 209 219 22 40 51 M32 x 2 53 Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

MY1

Note) Operating range Note) 8.5 MY1MW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 40 32 25 Mounting position 25 Mounting position 32 40 50 63 25 Mounting position 32 40 50 63 139.5 184.5 229.5 278.5 323.5 A 139.5 184.5 229.5 139.5 184.5 229.5 278.5 323.5 A A 80.5 95.5 110.5 121.5 136.5