Round Type Hydraulic Cylinder

30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ In addition to the models in the above table, there are some other auto switches that are applicable.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Refer to Minimum Stroke for Auto Switch Mounting on page 54.

ZCUK

Note 4) Figures in ( ) in the table W are D-A93.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

2

10 10 P1 = 0.5 MPa P1 = 0.7 MPa IDG 20 20 P1 = 0.7 MPa IDG100 IDG75 30 30 IDG75H IDG100H 40 40 50 50 0 200 400 600 800 1000 0 400 800 1200 1600 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA, IDG50LA IDG60LA, IDG60SA Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C)

e-Rodless Actuator

Auto Switch Internal Circuit D-A90 (V) Contact protection box OUT () Brown Reed switch Unit: g Weight Table CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93 (V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93/D-A96

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56 66 8-25-11 11 Series MGZ With Mounting Bracket Transaxial foot style: (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50

CE

Rod side flange style Cable length 20 mm Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 3 pcs.

Magnetically Coupled Rodless Cylinder

25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Bottom screw cannot be rotated Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Threaded orifices 3.

MTS

Selection conditions Mounting: Horizontal Maximum speed: 600 mm/s Stroke: 125 mm Overhang: 80 mm Load weight: 0.7 kg Mounting: Vertical Maximum speed: 800 mm/s Overhang: 50 mm Load weight: 2 kg Refer to graph (7) based on vertical mounting and the maximum speed of 800 mm/s. On graph (7), find the intersecting point for the overhang of 50 mm and the load weight of 2 kg to determine 32.

JIS Standard Hydraulic Cylinder

38 58 M10 x 1.25 32 11 3/8 158 16 39 37 11 40 25 to 800 65 45 32 M10 x 1.25 11 3/8 12 158 42 36 11 50 25 to 800 52 76 M10 x 1.25 40 11 1/2 176 15 46 43 13 63 25 to 800 63 90 M12 x 1.5 42 14 1/2 186 15 52 43 15 80 25 to 1000 80 110 M16 x 1.5 40 16 3/4 202 17 65 44 18 100 25 to 1000 135 102 42 M18 x 1.5 18 3/4 19 212 75 44 20 (mm) Rod series B-series rod C-series rod Bore size (mm) E E MM

CRQ2

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 = X = 6. 7.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MG RB0805-X552 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RB1006-X552 CX 2.

MXW

0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !4 !1 !3 !2 @0 !9 o u i Component Parts No.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting Caution 1. Do not scratch or gouge the mounting surfaces of the body, table and end plate.

CQM

4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

CXT

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX A shock absorber can be installed (option). D-X Can be mounted on two sides. 20Mounting from the bottom side Mounting from the upper side Data Guide of high rigidity Adjusting bolt with bumper is standard.