Bore Size: 6mm, Port Thread: (M3 Thread-6)(M5 Thread-10~15mm)(Rc-20~63mm), Stroke: 300mm

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm

Types: Gasket, Maintenance part name: Seal kit, Bore size(ø): 12, Compatible air cylinder details: Compact Cylinder, Single Acting, Spring Return Type, Material: NBR, Stroke(mm): -, Surface Treatment: -

Bore Size: 6mm, Port Thread: (M3 Thread-6)(M5 Thread-10~15mm)(Rc-20~63mm), Stroke: 100mm

Bore Size: 6mm, Port Thread: (M3 Thread-6)(M5 Thread-10~15mm)(Rc-20~63mm), Stroke: 250mm

Bore Size: 6mm, Port Thread: (M3 Thread-6)(M5 Thread-10~15mm)(Rc-20~63mm), Stroke: 300mm

Bore Size: 6mm, Port Thread: (M3 Thread-6)(M5 Thread-10~15mm)(Rc-20~63mm), Stroke: 50mm

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 250mm

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 300mm

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 50mm

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm

High Vacuum Angle Valve

100 160 Switch Heater Indicator High-temperature type XLA-100/160-X152 Single acting (N.C.) 106 to atmospheric pressure 1010 1011 XLC-100/160-1-X152 Double acting 1 When the standard seal material (FKM) is used XLA/C-100/160(-1)-X152 18-E692 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal XLA-100/160-X152 How to Order XLA 100 w e r q X152 A M9N u t y Improved durability of

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100 Gripping point L (mm) Gripping point L (mm) Misc.

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

Table of Contents

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

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to 100 MGPL32 to 100 i !

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Caution 5 150 100 200 300 1.

Rotary Actuator/Vane Type

Operating range and hysteresis How to change the auto switch detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3