Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Air Slide Table

40 ST 150 ST 150 0.400 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.020 ST 50, 75 0.350 0.015 ST 100 ST 125 ST 125 0.300 ST 10 to 100 0.015 ST 40, 50, 75 0.250 ST 125 ST 100 0.010 0.200 ST 100 0.010 0.150 ST 10 to 50 ST 125, 150 ST 10 to 30 0.005 ST 75 ST 150 0.100 0.005 0.050 0.000 0.000 0.000 0 50 100 0 50 100 0 50 100 Load [N] Load [N] Load [N] ST = Stroke

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

kg 250 Load weight m (kg) 200 63 150 Since the conditions are vertical upward mounting with a speed of 500 mm/s, use graph (2).

CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12

Compact

LAT Speed [mm/s] Work load: Horizontal [kg] Equivalent lead [mm] Stroke [mm] Series Size Page LZ 6 (10) 25 1000 Page 170 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 LEMB Basic type LC3F2 48 11 (20) 1000 Page 170 32 LEMC Cam follower guide type 25 10 1000 Page 170 50, 100, 150, 200,

Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 39, Table Size Height H(mm): 39, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Piping Format: Centralized piping type, Port Screw Type: Rc, Cushion: Rubber cushion, Switch Rail: Yes, Specification: Magnet built-in, Auto Switches: M9B

CHKD/CHKG

) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11-9-10 11 Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7 How to Order CRB2 CRBU2 MSQA A M9B 1 High precision type CRB1 MSQB A M9B 1 Basic type MSU Number of auto switches CRJ Courtesy of Steven Engineering, Inc.-230

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

CLS

+ 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80 D-Y59/Y7P D-Y7W 115 115 110 105 15 RLQ 1, 2 MLU D-Y69/Y7PV D-Y7WV 100

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

225 48 200 213 4 175 188 15 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 37.5 50 88 75 250 225 54 200 213 4 175 188 17 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 25 37.5 50 88 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125 275 51 75 112 250 64 12.5 25 37.5 50 100 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125

XM, XY

(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

JIS Standard Hydraulic Cylinder

2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 135 + 55 140 + 55 120 + 55 150 + 55 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 + 55

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting B L F G BZ FZ Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange Solid state Auto switch M9B, M9BW Reed

ISO Standard Hydraulic Cylinder

(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) CH2 2 (Different surfaces and same surface), 1 20 110 150 140 135 130 125 D-F5/J59 D-F5W/J59W D-F5BA/F59F (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 CHA 20 + 55 110 + 55 125 + 55 130 + 55 135 + 55 140 + 55 150 +