Modular Design with Uniform Body Style

C C B IN OUT IN OUT 2 x P (Port size) 2 x P (Port size) Clearance for maintenance G Drain A Drain A E Optional specifications Semi-standard PC/PA bowl Metal bowl Metal bowl with level gauge With element service indicator Drain cock with barb fitting With drain guide With drain cock With drain guide With drain cock With drain guide Applicable model With auto drain B B B B AFM20-D AFD20-D C1

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

.: 8 5/16" C1 C1 2 x M12 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" U side D side (L4) L3 (C6: 3.2) (N7: 7) SI unit (4.9) 26.2 9.5 8 58.4 36.9 5.5 B B B B B 35 A A A A A 18 COM PWR 28.8 83.7 92.2 42.3

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

) EX600-DX#C1 (5 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DX#C1: 0D (Hex) Unit parameter 0 Monitor short circuit (power) 0: disable, 1: enable 1 Reserved 0 2 Inrush current filter 0: disable, 1: enable 2 3 Reserved 0 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2:

Hydraulic

Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Metric Long stroke Standard stroke Without auto switch With auto switch A Long stroke L1 24 25.5 28.5 32.5 Long stroke (mm) Standard stroke (mm) Standard C Bore (mm) Bore (mm) With/Without auto switch A C1 H1 X Inch L1 14 15.5 18.5 22.5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 32 32 41 44 F 7.5 7.5 9 11 L B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10

IDX-OM-W035

MC CM C1 CM ILS TDR MC ILS V MC TDR CN CN V CN CN PRS PRS MC TDR MC TDR IDFB37E IDFB55E/75E-46 GFCI CM R 3 1 2 FM16 TB MC1 TDR MC THR MC1 MC1 MC2 CM PE PRS MC2 PRS1 FM PE PRS2 PRR PRR ILS C01 TB1 W TB2 1 T C1 W 2 C01 CM ILS TDR PRR MC1 MC1 GFCI OLR MC2 PRS1 EDV P THR TDR PRS2 TDR P THR PC EDV PE V T IDFB Series 11-6 11-4 IDX-OM-W035 12 V 12 V 12-1 ( ) IDFB

EX500-GPR1A.eng

For GW unit Manifold valve Input unit manifold configuration NOTE When no Input unit is connected to the connector ( C1 ) or ( 0 ) of SI unit, mount a terminal plug on the connector.

Electric Actuator/Slider Type

[mm] Width across flats B1 Size B1 C1 H1 L1 L2 MM H1 C1 L2 25 22 20.5 8 38 23.5 M14 x 1.5 32 22 20.5 8 42.0 23.5 M14 x 1.5 63 27 26 11 76.4 39 M18 x 1.5 L1 The L1 measurement is when the unit is in the Z-phase first detecting position.

CQS

Rod end male thread Bore(mm) 12 16 20 25 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 C1 9 10 12 15 H1 M5 X 0.8 M6 X 1.0 M8 X 1.25 M10 X 1.25 Basic Bore (mm) Stroke range (mm) A 25.5 25.5 29 32.5 W/o auto switch With auto switch (All dimension are common except "A" and "B").

Table of Contents

Hysteresis (3 digits) OFF ON point = C, C1 OFF point = C-3 digits, C1-3 digits (1 digit is the minimum setting unit.) Other Functions Key lock mode Used to avoid a malfunction when buttons on the front part of the switch are pressed. Initiate key lock Release key lock SET SET Press the SET button to complete the setting. Press the SET button to complete the setting.

Tie-rod Type Hydraulic Cylinder

C1 B E 4 x 22l SWRM 80 80 all types Polished round 18SPCC 71.5 4 16 61.5 5 A 100, 125 all types 160 all types 5 x 30l SWRM 100 Polished round 20SPCC 82 5 20 72 5 5 x 30l SWRM 160 Polished round 22SPCC 94 5 20 79 7.5 Note) Does not come with other accessories.

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

MQQ

36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 28 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 With rod end male thread: MQQDM Rod end nut H1 Bore size (mm) L1 C1

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Table of Contents

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

CLQ

L1 X C1 H2 Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Table of Contents

Model B3 C1 14 20 22 C2 39 44 54 E1 1 1 1 E2 1 1 1 B1 28 40 44 78 88 108 96 111 131 MY-J25 MY-J32 MY-J40 8-11-29 29 Series MY1B Floating Bracket Facilitates connection to other guide systems. Applicable bore size Floating Bracket Operating Precautions Caution Make sure that the amount of divergence from the external guide is within the adjustable range.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

JXC-C1 To M PWR Motor control power supply/ Motor power supply 24 VDC Provided by customer. Main control power supply 24 VDC V Motor power supply connector (Accessory) AWG16 (1.25 mm2) Page 606-7 V Controller setting kit (Controller setting software and USB cable are included.)

Multi-Axis Step Motor Controller

JXC-C1 To M PWR Motor control power supply/ Motor power supply 24 VDC Provided by customer. Main control power supply 24 VDC V Motor power supply connector (Accessory) p. 12 AWG16 (1.25 mm2) VController setting kit (Controller setting software and USB cable are included.)