Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

EX500-GPR1A.eng

SI unit for SV series valves ( EX500-S 01 ) ( EX500-Q 02 ) PWR PWR COM COM 64.4 80.3 64.4 28 66 84.8 79.4 68.5 80.3 series 54.5 60 60 43.2 43 43.2 22.2 22 22.2 13 10.5 28.6 44 0 1 36 10.5 1 0 22 23 The mounting and removing methods of SI unit are as shown below.

ZP3

w q ZP3 T N 04 B5 e Connection thread (Female thread) M5 x 0.8 Width across flats D B5 M5 x 0.8 5 Model A B C2 D Vacuum inlet direction q Pad dia.

Connecting Tubes: 6 pcs., Form: Multi-connector, Tube Size: 23 (3.2mm)

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 3.2, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 6, Connector Type: Multi-connector, Options: None

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

Large Type Vacuum Unit Series ZR

Manual operation C2 Air operated C3 N.O. Nil Non-locking push type C4 Double SOL.

Table of Contents

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

Air Fittings & Tubing

Color of release button Socket KDM10S-23 KDM10S-04 KDM10S-06 KDM10S-08 KDM20S-23 KDM20S-04 KDM20S-06 KDM20S-08 3.2 4 6 KDM10P-23 KDM10P-04 KDM10P-06 KDM10P-08 KDM20P-23 KDM20P-04 KDM20P-06 KDM20P-08 10 8 3.2 Blue 4 6 8 20 Mixed Sizes of Plug Connectors and Socket Connectors Panel mounting qLoosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No.2) until

1

165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.

HRX-OM-W002

25 26 27 28 23 35 36 (CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8

Electric Actuator/Slider Type

data 64 points 14 points Power supply voltage 24 VDC 8 Series LEFS Specications (1 kg = 2.2 lbs) Step Motor (Servo/24 VDC) Model LEFS16 LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 100, 200, 300, 400 100, 200, 300 400, 500, 600 100, 200, 300, 400 500, 600, 700, 800 200, 300, 400, 500, 600 700, 800, 900, 1000 Work load [kg] Note 2) Horizontal 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 23

Electric Actuators

READY 23 System ready signal General purpose input/output terminal: CN2 Indicates that the SET-UP operation (start ready operation: return to home position after servo ON) is complete when ON. The state in which the program can be run. SET-ON 10 Start readiness signal CN2 24VDC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON.

CXS

NBR O-ring Copper alloy Check seal retainer 23 24 Stainless steel Cushion needle NBR Check seal 24 25 Copper alloy Check seal retainer NBR Needle gasket 25 26 NBR Check seal NBR Check gasket 26 27 NBR Needle gasket Replacement parts: Seal kits 28 NBR Check gasket Kit components Bore size (mm) Seal kit no.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B 4 I/O // JXC73/83 Series 1. . 5 2. . 7 2.1 . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 (1) . 11 (2) . 12 (3) . 13 3.6 . 14 (1) . 14 (2) . 17 (3) . 19 3.7 JOG . 20 (1) . 20 (2) . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 (3) . 24 (4) . 24 4. . 25 4.1 . 25 4.2 . 26 4.3 . 27 (1) . 27 (2) DIN . 27 4.4 . 28 (1

Environment

1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.

Vacuum Unit

VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

/J79W D-F7BA/F79F D-F7NT D-F7mV D-F7mWV D-F7BAV D-J79C D-A79W D-A73C D-A80C Hs Hs Hs Hs Hs Hs Bore size 10 17.5 17.5 23.5 20 23 19 16 21 20.5 26.5 23 26 22 Auto Switch Made to Order 11 Series CJ2Y Minimum Stroke for Auto Switch Mounting (mm) Auto switch mounting Auto switch model Number of auto switches With 1 pc.

SMC Basic Pneumatics

23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided, with mechanical coupling

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23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided, with mechanical coupling Slide