Air Cylinder

24 23 13 23 126 127 137 8 25 72 73 83 13 24 24 23 13 23 130 131 141 8 32 72 75 83 13 24 24 21 13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke

Stability of suction position,

ZP3EU-F6-YAL16 [Weight: 376 g] M16 x 1.5 Width across flats 22 M16 x 1.5 Width across flats 22 6 6 25 77 52 6 6 25 52 77 Rc1/8 Rc1/8 Width across flats 24 Width across flats 24 42 11.11) 32 32 42 11.11) 19 19 4 4 30 30 Applicable pad part no. ZP3E-125UM ZP3E-100BM (Rotating angle) (Rotating angle) Applicable pad part no.

MY1

(Nm) m1 MTS M3 = m1 x g x Y = 6.525 x 9.8 x 29.6 x 10-3 = 1.89 (Nm) Load factor 3 = M2/M2max = 1.89/24 = 0.08 MY M2 CY 5.

Table of Contents

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

C76

60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 XT 24 25 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 CZ LT 4 5 XB 47 57 XC CE CG 41 52 CH 35 40 CO 4 3 CR 24 30 CT 20 28 CU 0.025 0.047 10 32 40 34.5 46.8 57.9 7 10 96 129 97 122 9 12 97 122 12 0.032 0.059 42.5 58.2 72.3 6-10-16 6-10-16 17 Series C76 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Accessory Dimensions [

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

C76

60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 XT 24 25 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CZ XB 47 57 XC CE CG 41 52 CH 35 40 CO 4 3 CR 24 30 CT 20 28 CU 0.025 0.047 10 32 40 34.5 46.8 57.9 7 10 96 129 97 122 9 12 97 122 12 0.032 0.059 42.5 58.2 72.3 6-10-16 6-10-16 17 Series C76 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Accessory Dimensions [

Cylinder with Lock

no. a (Max.) b c (Min.) d e f H9 (Hole) f h11 (Shaft) l1 32 GKM10-20 20 10+0.5 +0.15 20 40 M10 x 1.25 10 10 52 40 GKM12-24 24 12+0.5 +0.15 24 48 M12 x 1.25 12 12 62 50, 63 GKM16-32 32 16+0.5 +0.15 32 64 M16 x 1.5 16 16 83 80, 100 GKM20-40 40 20+0.5 +0.15 40 80 M20 x 1.5 20 20 105 * Supplied with clevis pin and clevis pin bracket Rod end: KJ (ISO 8139) l l3 [mm] Bore size Part no. b1 h12

Battery-less

44 30.5 36 106 2 6.8 220 3 x M6 x 1 thread depth 10 65 11.5 50.5 depth 6 +0.03 +0.01 6 A 7 6.5 24 F G x 12 16.5 18 40 (G1) x F 21.5 52 Motor cable (2 x 5)5 Table operating range1 Stroke end [Origin]3 1 [1] K 10 Origin2 [Stroke end] N 19.5 16.5 (M) (2.2) Stroke 6 J 5H9 ( ) depth 5 +0.030 0 +0.030 0 5H9 ( ) depth 5 56 (37) 24.5 F (G 1) x F Connector With lock 24 Motor cable 24 Lock cable

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L1 With auto switch Without auto switch Standard stroke (mm) Bore (mm) L LD LG LH LT LX LY LZ X Y Inch Metric 24 25.5 28.5 32.5 LS 15 15 24 24 B 27 27 36 39 A 54 54 65 69 LS 10 10 14 14 B 22 22 26 29 A 49 49 55 59 12 16 20 25 21.5 21.5 22.5 24.5 13.5 13.5 14.5 15 5 to 30 5 to 30 5 to 50 5 to 50 4.5 4.5 6.6 6.6 2.8 2.8 4 4 17 19 24 26 2 2 3.2 3.2 34 38 48 52 29.5 33.5 42 46 44 48 62 66 8 8

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Tentative determination of L type (For intermediate stops, refer to page 8-15-52.) (Refer to page 8-31-1.)

MG

48 124 300 171 34 50 M8 x 1.25 16 104 46 4 22 44 4.5 118 3 86 6 106 72 24 48 124 200 300 84 122 172 36 66 M10 x 1.5 20 130 48 5 24 60 6 146 4 110 8 130 92 24 48 124 200 300 86 124 174 38 80 M10 x 1.5 20 130 50 5 24 70 6 158 4 124 8 142 110 28 52 128 200 300 88 124 174 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore

Micro Mechanical Valve Series VM1000

) 1 (P) (74.1) 3 port (A) 2 52 22 13 32 12 10 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 40 30 25 * 0.5 MPa supply F .O.F .* 52 N T.T. 6.5 mm 17 2/3 Port Mechanical Valve Series VM200 Series VM200 Push button (Flush) VM220-02-33A VM230-02-33A Panel mounting hole 38 23 T.T. 1.5 3 1.5 16.5 R port (3 port only) Max. 6 Symbol 2 port 22.1 (A) 2 (90.6) 12 10 (74.1) 1 (P) 52 3 port 22 13 (A)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.

SY

SX5000-50-1AC4 C6 C8 Manifold block assembly SX3000-50-1A-C4 C6 1 SUP/EXH block assembly SY3000 P, R ports 8 One-touch fitting SY5000 P, R ports 10 One-touch fitting 2 SX3000-51-1A SX5000-51-1A 3 End block assembly R SX3000-52-1A SX5000-52-1A For D side 4 End block assembly L SX3000-53-1A SX5000-53-1A For U side M3 x 26 (Flat nickel plated) Round head combination screw 5 SY3000-23-4 Refer

Fluoropolymer Piping Equipment

22 22.5 19.5 24 22 10 20 24 21 24 52.5 50.5 48.5 45.5 52.5 50.5 29 25 29 7.5 LQ3T41-R5 12 10 24 22 22.5 19.5 24 21 52.5 50.5 48.5 45.5 29 25 LQ3T51-R1 19 12 19 7 26.5 24 24 22 26.5 24 14 28 32 24 32 64 61.5 58.5 56.5 64 61.5 37 29 37 9.5 LQ3T51-R5 19 12 26.5 24 24 22 32 24 64 61.5 58.5 56.5 37 29 LQ3T61-R1 25 19 25 8 30 26 26.5 24 30 26 18 36 41 32 41 78 74 70 67.5 78 74 49 37 49 16 LQ3T61

C95

8 5.4-52 -XC12 Tandem cylinder !

MGP

120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38

Electric Actuator/Slider Type

(Refer to page 24 for details.)