Industrial Filters

2) 2 Note 2) 2 Note 2) Number of elements 1 1 1 1 FGE 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover SCS14 Aluminum FGG Case Stainless steel 316 SPCE Main materials Gasket/O-ring Fluororesin NBR FGA Seal Nylon/Fluororesin Nylon Fluororesin FGC Weight (kg) 1.3 2.2 2.3 3.8 2.3 3.8 1.3 2.2 1.7 3.4

Series SV

Note 1) Note 1) Note 1) Note 1) Double wiring specification Double wiring specification Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... 09 02 04 02 12 02 04 02 4 stations 2 stations 9 stations 2 stations 4 stations 2 stations 12 stations 2 stations Note 2) Note 2) Note 2) Note 2) Specified layout (Up to 18 solenoids

SV

specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

)] PNP output / Wiring top entry Copper-free, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

Booster Regulator Series VBA1110 to 4200 1

Accessory (Option) /Part No. 0.2 to 1.0 MPa VEX Model VBA2200 Ambient and fluid temperature 2 to 50C (No freezing) VBA1110-1 VBA4100 VBA2100 VBA4200 Description AMR G27-20-R1 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 1) Double wiring Note 1) Double wiring Note 1) Double wiring Note 1) 09 02 04 02 12 02 04 02 9 stations 2 stations 4 stations 2 stations 4 stations 2 stations 12 stations 2 stations Specified layout Note 2) Specified layout Note 2) Specified layout Note 2) Specified layout Note 2) (Up to 18 solenoids possible) (Up to 8 solenoids possible) (Up to 24 solenoids possible) (Up to 8 solenoids

Table of Contents

-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

(N, E) ALT-5 (N, E) ALT-5-IS-1, 2 (N, E) ALT-9 (N, E) ALT-9-IS-1, 2 Material Qty. y G46-10-02(Nil, E) G46-P10-N02(N) 12374AP Pressure gauge 4 1 NBR Cam handle assembly Seal 5 6 7 8 1 2 1 1 12377 12384 Siphon tube assembly Float switch 123712A IS410-1, 2 IS410-1, 2 1049 ALF400 to 900, ALT-5/-9 Series Dimensions: Auto Feed Lube ALF400 ALF800/900 Port size Port size D ALF500/600 Port size

7ND9071en

SPOOL VALVE PNEUMATIC CONNECTIONS (S, C1, C2) ND7_HXT, ND7_HZT: II 1 G Ex ia IIC T6...T4 Ga II 1 D Ex ta IIIC T90 C Da II 2 G Ex ib IIC T6...T4 Gb II 2 D Ex tb IIIC T90 C Db Ui 28 V, Ii 120 mA, Pi 1 W, Ci 22 nF, Li 53 H, external load resistance 0690 . 02 Low capacity. Stroke volume of actuator < 1 dm3. G 1/4 (ND7100), 1/4 NPT (ND7200). 03 Medium capacity.