Booster Regulator Series VBA1110 to 4200 1

G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

Table of Contents

7 !8 !

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

HRX-OM-X084

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Trouble shooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

5

Bore size A AL B B1 B2 C2 D E F FL FD FT FX FY FZ G H H1 H2 I 20 18 15.5 34 13 26 30 8 20 0 0.033 13 10.5 7 4 60 75 8 41 5 8 28 25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 37.5 40 24 21 52 22 41 47.3 14 32 0 0.039 16 13.5 7 5 66 36 82 11 50 8 10 46.5 Female Rod End (mm) (mm) Bore size K KA MM NA NN

EX500-GPR1A.eng

Socket Connector Pin Layout Plug Connector Pin Layout 1 8 1 7 6 5 4 3 2 8 3 4 5 6 7 Two communication connectors in SI unit and one communication connector in Input unit are installed respectively. To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW.

CATALOG

8 ASV310F-02 PT1/4 7 8 ASV410F-01 PT1/8 13.5 14 ASV410F-02 PT1/4 13.5 14 ASV410F-03 PT3/8 13.5 14 ASV510F-02 PT1/4 23 27 ASV510F-03 PT3/8 27 29 ASV510F-04 PT1/2 27 29 Model Applicable T H D1 D2 L1 L2 L3 L4 *A M1 Weight g H O W T O O R D E R S E R I E S (N)ASV Tube OD Max Min Max Min ASV120F-M3-04 4 M3x0.5 5.5 9.5 7 21.5 25 9.8 28.6 26.1 25.8 23.3 13 5 ASV220F-M5-04 4 M5x0.8

Table of Contents

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

KJ

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15

Table of Contents

7 6 7 17 Mounting Bracket Part No.

Table of Contents

2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

A

5 1/2 1/2 3/4 7/16 7/8 1/2 3/4-16 5 7/16 0 2.34 2.72 400 (4) 1/2 1.57 3.32 1 1/8 1 1/2 1 1/2 3/8-24 4 1/2 1 3/8 4 1/4 5 53/64 1 4.7 1.18 6 1/4 1/2 3/4 7/16 7/8 1/2 3/4-16 Courtesy of Steven Engineering, Inc. !

Low Maintenance Filter Series FN1

FN11V FPM KT-FN11V 7 Low Maintenance Filter Series FN1 Dimensions Rc 1/4 0 315 45 IN OUT B.C.D230 135 225 42 4-11 G46-15-02 Pressure gauge port size Rc 1/4 Note) Use the Pc 1/4 port marked with an asterisk when designing an air release circuit.

Table of Contents

Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7.

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A