Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Micro Mechanical Valve Series VM1000

POM POM 2331 Series VFM300 Series VFM300 Basic VFM350-02-00 Symbol (C1) 2 (C2) 4 2 x 3.8 M5 x 0.8 Accessory mounting hole (Pilot exhaust port) 12 14 3 (E1) 1 (S) 5 (E2) 0.5 MPa supply 3.0 mm T.T. 2.0 mm O.T. 1.0 mm P.T. 16 N F.O.F. 2 x 4.2 mounting hole (SUP CYL port) 3 x 1 4 2 x 1 8 (EXH port) Roller lever VFM350-02-01 VFM350-02-01S 14 polyacetal or head steel roller Symbol (C1) 2 (C2

SMC Pneumatic Clean Series

21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard port C2 2-FD 2-P Width across flats B2 G H2 G 2-NN (Rc, NPT, G) Width across flats B1 H1 B Relief port M5 x 0.8 (This drawing shows the cases of 20 and 25.)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators C2 2 x P (Rc, NPT, G) M5 x 0.8 Effective thread length 2 x FL Width across flats B2 2 x NN B (This drawing shows the cases of 20 and 25.)

7ND9071en

Screw 306 1 Bed of Local User Interface (LUI) 307 3 Screw 308 2 Screw 311 1 Shaft 312 2 Screw 313 2 Cam disc 314 2 Screw 315 6 Terminal block 322 1 Proximity switch (D__) 323 2 Screw 346 1 or 2 Bushing (I__) 347 2 Inductive proximity sensor (I__) 348 1 Fastening plate 349 2 Screw 350 1 Washer 351 1 Screw 355 2 Microswitch (K0_, B06) 357 2 Spring washer (K0_, B06) 358 2 Screw (K0_, B06) 44

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.4MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Option: With M5 (female thread), Size: 57, Transparent cover material: Polycarbonate, Special Configurations: None, Attachment: Clear cover has protrusion. (Clear cover is removable). The wrench flats protrude., Unit Specifications: MPa

Specifications: Oil-free, External parts copper-free, Display Pressure: -100 to 0 kPa, Connection Thread: R 1/8, Option: w/M5, Female Thread, Attachment: Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude

Specifications: None, Display Pressure: -100 to 0 kPa, Connection Thread: R 1/8, Option: w/M5, Female Thread, Attachment: Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude

Specifications: None, Display Pressure: -100 to 100 kPa, Connection Thread: R 1/8, Option: w/M5, Female Thread, Attachment: Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude

Specifications: E (Oil-free, External parts copper-free), Display Pressure: -100 to 0 kPa, Connection Thread: 01 (R 1/8), Option: M (w/M5, Female Thread), Attachment: C2 (Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude)

Specifications: None, Display Pressure: -100 to 0 kPa, Connection Thread: 01 (R 1/8), Option: M (w/M5, Female Thread), Attachment: C2 (Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude)

Specifications: None, Display Pressure: K1 (-100 to 100 kPa), Connection Thread: 01 (R 1/8), Option: M (w/M5, Female Thread), Attachment: C2 (Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude)

Series SV

With external pilot specification (Pitch) P = 10.5 13.5 46.9 14.1 8.4 18.3 11.8 8.6 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 9.5 19.7 24.6 23 3 5 E 5 3 E 3 5 E 5 3 E 43.2 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 C2 C2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 X PE PE x 2-M12 C1 C1 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.:

SV

With External Pilot Specifications (Pitch) 46.5 17.5 P = 16 20.5 11.8 15.8 9.5 9.2 11.9 20.6 25.2 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 44.1 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 C2 C2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P C1 C1 PE X One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE 2-M12 X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

C1 = C D1 = (mm) L2 max Y D2 Size (mm) 10 D1 X L1 max Y 1 3 Size 2 to 8 C1 L1 = 10 15 3 Y 1.5 2 to 14 X 1 3 to 4 3 to 9 Y = C2 L2 = 15 20 3 to 4 Y 1.5 3 to 18 X 1.5 3 to 5 3 to 10 X = D2 = 20 30 3 to 5 Y 2 3 to 20 X 1.5 3 to 6 3 to 13 C2 = C 30 40 3 to 6 Y 4.5 3 to 22 X 2 3 to 8 6 to 15 Symbol: A7 The long shaft can be further shortened by machining it into a stepped round shaft with male

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !