SYJ300/500/700

plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (WO): SYJ74-WO01 02 VZ VS VFN Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

0.4

Note 2) : Stations 02 to 24 Note 3) For S/P/F/L kits Replacement Parts No. Part no. Description Material Quantity VVQ1000-80A-1 VVQ1000-80A-2 VVQ1000-80A-3 VVQ1000-80A-4 o !0 !1 !

A

Model Port size A B C D E F G H J K L M N P B B S Y M B O L S NAC1000 M5X0.8 91 84.5 25.5 25 26 25 33 20 4.5 7.5 5 17.5 16 38.5 86.5 NAC2000 18 14 140 125 38 40 56.8 30 50 24 5.5 8.5 5 22 23 50 120.5 NAC3000 38 181 156.5 38 53 60.8 41 64 35 7 11 7 34.2 26 70.5 182 NAC4000 12 238 191.5 41 70 65.5 50 84 40 9 13 7 42.2 33 88 217 NAC5000 34 300 271.5 48 90 75.5 70 105 50 12 16 10 55.2 40

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

ZP

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 7 to 8) 1 setBlanking plate part no.

F

) (g) Applicable Thread Model H D L A M Effective Weight Tube O.D T (Hex) Orifice (mm2) (g) (mm) Nylon/Urethane (mm) Nylon/Urethane 3.2 M3x0.5 KJS23-M3 1.5 7 18 15.5 14.5 1.4 1.4 3.2 M3x0.5 KJF23-M3 7 7 18.5 6 14.5 3/2.5 2.6 3.2 M5x0.8 KJS23-M5 2 7 21.5 18 14.5 2.5 2.9 3.2 M5x0.8 KJF23-M5 7 7 21 7.5 14.5 3/2.5 2.9 4 M3x0.5 KJS04-M3 1.5 8 18 15.5 14.5 1.4 1.5 4 M3x0.5 KJF04-M3 8 8 18 5.5 14.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

gasket positioning Rc(PT)1/4 P port VQZ VQD 0 1 0 1 DIN connector (Y): VQZ312 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ312 (R)wLwC6, C8, C10, 02 VZS 107.5 <108.5> 300 VFS (Lead wire length) 71 <72> Indicator light VS VS7 111.5 MAX.10 31.5 <35> Applicable cord O.D.

Series KP/KPQ/KPG

-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2

Series KP/KPQ/KPG

-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2

KP/KPQ/KPG

KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R)

VZ100/300/500

hole) Manual override (Non-locking) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG (Lead wire length) VP G: 300 mm H: 600 mm S070 VQ VKF (PE port) VQZ (P , A, R port) VZ VS L plug connector (L) VZ54-LM plug connector (M) VZ54-M01 02 01 02 01 02 DIN terminal

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ312M-l-M3 SYJ322-l-M3 SYJ322M-l-M3 How to Order SS3YJ3--20-05 -A Port M3 X 0.5 Stations Bracket Applicable blank plate ass'y SYJ300-10-1A 2 stations 02 Without bracket R Port With bracket F ... ...

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150 133

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

5/16" 15.2 12.8 17 6 25.2 42.6 18.4 34 7 34.7 18.5 40.7 1.5 R 1/4 17 AS231F-02-08ST AS231F-N02-03ST 16 5/32" 10.4 15.2 18.5 8 28.2 45.6 35.2 18.3 12.9 30.6 21.9 40.1 10.9 16.2 AS231F-02-10ST AS231F-N02-05ST 17 3/16" 11.4 18.5 21 10 31 48.4 38.7 20.2 31.1 23.9 42.6 AS331F-02-06ST AS231F-N02-07ST NPT 1/4 17.5 19 40.7 1.5 34.7 7 1/4" 13.2 18.5 12.8 17 25.2 47 6 38.5 34.2 25.6 45.6 12.9 20.6

VM

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

Intrinsically Safe Valve

(LL) 53-SY5 20-LL-01 (-F2) 3 4 5 L (Lead wire length) 156 Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 14.7 12 84.3 Terminal type (TT) 53-SY5 20-TT-01 (-F2) 3 4 5 Max. 10 L (Lead wire length) 189.6 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 101.1 7 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY7000 2-position single L-type plug connector (L) 53-SY7120-L-02 (-F2) With