HRX-OM-S004

-W-20/40/46. 8-11 8.4 Cooling capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC.

CM2

Auto switch model Bore size (mm) 20 Bore size mm 20 25 32 40 25 32 40 Axial foot* CM-L020B CM-L032B CM-L040B D-C7/C8 D-H7l Flange CM-F020B CM-F032B CM-F040B BM2-020 BM2-025 BM2-032 BM2-040 Single clevis CM-C020B CM-C032B CM-C040B D-B5/B6 D-G5NTL Double clevis** (with pins) CM-D020B CM-D032B CM-D040B BA2-020 BA2-025 BA2-032 BA2-040 Trunnion (with nuts) CM-T020B CM-T032B CM-T040B D-A3lA/A44A

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Slider Type/Ball Bushing Bearing

to load's center of gravity (cm) 32 6 10 15 20 Bore size (mm) 40 6.48 3.6 + Lo 15 5 + Lo 45.5 6.5 + Lo 80.7 8 + Lo Allowable load mass (WA) (kg) 6.

o

(M5)l iOne touch fittinq i llor % tube l [ ]:ln case of manifold. t ):Without subplate So lenoid Specifications Specifications crommet(G) (H),Plug connector(L or M) 24VDC, 1 2VDC, 6VDC, sVDC, 3VDC, 1 1 oVAC' 20-100 Psl(1.5-7kst/cm,) 14-1m PSI(1-7kSf/cm?)

o

(M5)l iOne touch fittinq i llor % tube l [ ]:ln case of manifold. t ):Without subplate So lenoid Specifications Specifications crommet(G) (H),Plug connector(L or M) 24VDC, 1 2VDC, 6VDC, sVDC, 3VDC, 1 1 oVAC' 20-100 Psl(1.5-7kst/cm,) 14-1m PSI(1-7kSf/cm?)

VQ5000

Port size {ports 4 (A), 2 (B)} Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note1) 03 04 B CM Note) In case of CM indicate on a specification sheet. 2. How to order applicable valves VQ 5 1 5 0 Y 5 7 B W 3 2 4 6 1 5 Body type 1.Type of actuation 4.

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

Square Tube Type Air Cylinder Series MB1

(different sides, same side) Solid state switch 20 25 Y7BW(V) 1pc. 2pcs. (different sides, same side) 20 30 D-Y7BAL 1pc. Center trunnion is not included.

Table of Contents

(Type H) VCS 20 1 G Series Lead wire length w 20 30 40 Class 2 Class 3 Class 4 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 Tilt the screwdriver down in direction q so that the clip slides out in direction w. Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Electrical entry G C T TL Grommet Conduit Conduit terminal Conduit terminal with indicator light Clip part no.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

MQQ

Mounting Bracket Part Numbers Bore size (mm) Foot Note 1) Double clevis (with pin) Note 2) T-bracket Note 3) Flange Single clevis 6 CJK-L016B CJ-T010B CJK-F016B 10 CLJ-L016B CJ-T016B CLJ-F016B 16 CM-L020B CM-F020B CM-D020B CM-C020B 20 CM-L032B CM-F032B CM-D032B CM-C032B 25 Note 1) Two foot brackets and one mounting nut are included.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5)l iOne touch fittinq i llor % tube l [ ]:ln case of manifold. t ):Without subplate So lenoid Specifications Specifications crommet(G) (H),Plug connector(L or M) 24VDC, 1 2VDC, 6VDC, sVDC, 3VDC, 1 1 oVAC' 20-100 Psl(1.5-7kst/cm,) 14-1m PSI(1-7kSf/cm?)

%silltr

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

SMC Basic Pneumatics

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

IDX-OM-W011

P (BK) IDF11E-20 ILS PTC (50/60Hz) AC200/200,220V 2 1 (BK) 3 M (WH) L S CM (GR) 4 2 (SY) N (G/Y) OLR C (SY) PE 3 1 C TB PRS (RD) (BK) (WH) C11 FM P (BK) IDF15E1-10 PC CM ILS FM PTC OLR OLR ILS PTC PTC CM C01 C02 PRS PC C01 C02 C11 FM C11 PRS P IDF Series 6-4 6 5 IDX-OM-W011 6 IDF15E1-20 L PE N TB ILS CM FM PTC OLR OLR ILS CM PTC PTC PRS TB C11 C11 FM PRS P IDF Series 6

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Cylinder

-I ~ ime-sions~m ~-~~~--~-Nose mount: CO JPB u \2~ . c: n p w , ,," B' p I./l,ao~ hab ,/ (' B Rod end without thread w ",. /"(2 " .' ,," / ro~ ~ e ~With , autO sw.itCh Bore size w i (mm) 15S): 20~t ; .