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0 y !2 @5 !1 !7 @6 !0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

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ZS-20-5A-50 . 1 pc.

CATALOG

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Do not apply strong impact or an excessive moment while mounting the product or a workpiece. LEC SS-T LEC Y LEC Y If an external force over the allowable moment is applied, it may cause play in the guide or an increase in the sliding resistance. 3.

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(L): 3 4 5 3 4 5 3 4 5 3 4 5 SY7 20-L(-F2) C8, N9 C10, N11 D Y SY7 20(-F2) C8, N9 C10, N11 SY7 20-WO(-F2) C8, N9 C10, N11 SY7 20-M(-F2) C8, N9 C10, N11 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 66 58.5 47.2 Max. 10 32.1 31.5 [38.5] 36 16.1 42.6 [49.6] Approx. 300 (Lead wire length) M8 x 1 18.5 Pg7 70.6 [72.8] 60.8 [63] 80.6 79.7 55.8 75.3 69.7 62.3 154.2 [158.6] 52.8

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YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

CRB2/CRBU2/CRB1

Applicable shaft type: W (mm) Size L2 Y (mm) Size 10 X L1 3 to 8 5-(8-Y) to (Y-1) 10 15 9-(14-X) to (X-3) 5 to 14 3 to 9 6-(9-Y) to (Y-1.5) Y = L1= 15 20 8 to 18 10-(18-X) to (X-4) 3 to 10 7-(10-Y) to (Y-1.5) L2 = 20 30 10 to 20 10-(20-X) to (X-4.5) 5 to 13 8-(13-Y) to (Y-2) X = 30 40 10 to 22 12-(22-X) to (X-5) 7 to 15 9-(15-Y) to (Y-2) CRB1 Free-Mounting Type CRBU2 CRB2 Symbol: A11 Symbol

V100

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

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D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Smooth Cylinder/Low Speed Cylinder

A L1 MM R1 ND E1 U1 A1 16 20 22 28 38 44 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 25 30 30 40 50 55 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 16 20 36 44 56 64 21 25.6 41.6 50.6 64 72 20 25, 32 40 50, 63 80 100 8.5 10.5 16 20 23 24 10.3 12.8 12 16 21 24 34 41 42 56 71 79 +0.4 +0.2

MY1

Mass m X-axis Y-axis Z-axis Z 20 W 20mm 30mm 50mm 2kg 50 Y 30 3 Calculation of load factor for static load m: Mass m m max (from 1 of graph MY1B/m = 27 (kg) Load factor = m/m max = 2/27 = 0.07 X M: Moment m M max (from 2 of graph MY1B/M) = 13 (Nm) M = m x g x X = 2 x 9.8 x 20 x 10= 0.39 (Nm) M Load factor = M/M max = 0.39/13 = 0.03 M: Moment Y M max (from 3 of graph MY1B/M) = 1.6 (Nm

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Electric Actuator/Slider Type

800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60

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Note) D1: Max. diameter 15-4-20 13 Inch-size One-touch Fittings Series KQ2 Branch Y: KQ2U Applicable tubing O.D.

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

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Stainless steel, PPS, NBR FKM O-ring (Body) NBR t Return spring Stainless steel Cover SPCE y Clip Stainless steel q 17-2-66 7 Series VDW10/20/30 Compact Direct Operated 2 Port Solenoid Valve For Water and Air Dimensions VDW11 VDW21 22 20 Lead wire 300 300 Lead wire VC 27 20 21 27 Rectifying device VDW AC type Rectifying device 2-3.5 27 20 AC type 14 2-3.2 20 VQ 20.5 VX2 17 VX Courtesy

Battery-less

500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg