Table of Contents

Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Table of Contents

1 Drain q r e w t i u y o !0 !

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-1-F Note 3) AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-1-F Note 3) AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

Modular F.R.L. Units

When the above factors are present, or there is some doubt, use a metal bowl for safety. 86 AL10-A to AL60-A Series Construction AL10-A AL20-A w q t w q e OUT IN OUT IN y r u y u AL30-A/AL40-A AL50-A/AL60-A w q t w q t e e IN OUT IN OUT r y u r i y u Component Parts No.

REA/REB

Maximum load weight W CEP1 1 = W/Wmax = 1/3 = 0.111 = 0.333 Examine W. (For Wmax, find the value in when U = 500 mm/s.) L2 CE1 CE2 L1 ML2B M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] 2. Static moment W Examine M2. Since M1 & M3 are not generated, investigation is unnecessary.

REA/REB

Maximum load weight W CEP1 1 = W/Wmax = 1/3 = 0.111 = 0.333 Examine W. (For Wmax, find the value in when U = 500 mm/s.) L2 CE1 CE2 L1 ML2B M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] 2. Static moment W Examine M2. Since M1 & M3 are not generated, investigation is unnecessary.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

SX

) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

0.4

EX124D-SMJ1] Note 1) U S U S e w AXT100-1-P Note 2) U S U S SYJ AXT100-1-F Note 2) Note 1) Dust-tight, Water-jet-proof (IP65) Note 2) Top entry connector for FU, PU while side entry connector for FS, PS.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

EX260 Integrated-type (For Output) Serial Transmission System Series 10-SV RoHS How to Order Manifold 10-SS5V 10S1 D N 05 1 U W NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA 03 YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 Applicable air cylinder bore YA-08 80 62 10 25 11 26 8.5 16 D03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 76 12 30 14 31 10.5 18 YA YB YU Type A mounting bracket -X Bore size (mm) U V W Weight (g) Part no.

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Aluminum High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Smooth Cylinder/Low Speed Cylinder

REA CDU Double Acting, Single Rod (mm) W B A W B D-M9A D-M9AV D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) REB A B W A B W A B W A 10 16 20 25 32 12.5 3.5 (-1.5)1 16.5 7.5 2.5 16.5 7.5 0.5 16.5 7.5 4.5 16.5 7.5 2.5 REC (-2)0.5 16 4 20 8 1.5 20 8 -0.5 20 8 3.5 20 8 1.5 (-4)-1.5 20 6 24 10 0 24 10 -2 24 10 2 24 10 0 CY (-5.5)-3 22.5 7 26.5 11 -1.5 26.5 11 -3.5 26.5 11 0.5 26.5 11 -1.5

ISO Cylinder

11 22 14 30 C8512 0.3 10 15 6 15 9 20 C8510 Head ( side ) C858 0.5 6 10 4 10 6 14 0.1 0.7 4 8 3 8 4 11 Clevis: N Rod trunnion: U 0.3 24 36 17 35 22 46 0.5 18 27 12 26 16 W W 34 0.7 14 22 10 21 13 28 0.01 (40)1 (40)1 (40)1 (40)1 (100)1 0.3 80 400 350 300 250 200 150 100 50 450 0 (40)1 (40)1 Cylinder stroke [mm] Rod (side) 0.5 38 30 61 77 Head trunnion: U (40)1 0.7 35 32 25 51 64 W C85 Series

Battery-less

4 u u !2 !3 i e !5 r t w q y !6 !