MAIN BOARD FOR HRR024, CHILLER, 729, 0.13 lb

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5MPa Allowable Lateral Load at Rod End Standard type: MQQTB Lateral load resisting type: MQQLB/Built-in ball bushing 60 5 50 Maximum allowable lateral load W(N) Maximum allowable lateral load W(N) 4 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

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ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

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ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

CRQ2

auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without Without

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: Rc, Option 1: None

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: Rc, Option 1: DM (w/Electric Conductivity Control Function, Applicable to DI Water Piping)

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: Rc, Option 1: None, Option 2: Y (w/Feet and No Rack Mounting Brackets)

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: Rc, Option 1: T1 (Inverter Pump Mounted)

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: Rc, Option 1: None, Option 2: -

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: Rc, Option 1: w/Electric Conductivity Control Function, Applicable to DI Water Piping, Option 2: -

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: Rc, Option 1: None, Option 2: w/Feet and No Rack Mounting Brackets

C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

T-bracket Rod End Cap TN (U) (S + Stroke) TDH10 Round type/CJ-CR Flat type/CJ-CF +0.2 0 TU 7 12 4 x TC 12 TH TZ TX TK TT TW TY Material: Polyacetal TV Part no. Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.