Air Slide Table 9.5 10 5.1 A NN x M6 x 1 thread depth 9 6 HB GB Cross-sectional view A-A Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ20A-10Z 45 18 8 46 70 24.5 34 113.5 4 2 85 104 MXQ20A-20Z 40 18 8 46 70 24.5 34 123.5 4 2 85 104 MXQ20A-30Z 48 28 18 46 70 22.5 46 133.5 4 2 95 114 MXQ20A-40Z 58 28 18 56 80 22.5 56 143.5 4 2 105 124 MXQ20A-50Z 42 34 80 30.5 64 159.5 6 3 121 140 MXQ20A-75Z 55 22
B A B A B A B A B Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 31 26.5 26.5 30 45.5 43 48 42.5 40 29 32.5 39.5 37 42 36.5 34 33.5 29 29 32.5 45.5 43 48 42.5 40 31.5 35 39.5 37 42 36.5 34 36.5 32 32.5 35.5 46.5 44 49 43.5 41 34.5 38.5 40.5 38 43 37.5 35 41 36.5 37 40 51.5 49 54 48.5 46 39 43 43.5 41 46 40.5 38 46.5 42 42 45.5 58.5 56 61 55.5 53 44.5 48 51.5 49 54 48.5 46 53.5 49 49 52.5 58.5
Use a spanner corresponding to the size of hexagonal portion, or hexagonal portion may become deformed. 3. Tightening the threaded portion of an M3, M5 or M6 fittings 1) M3 First, tighten it by hand, then give it an additional 1/4 turn with a wrench. 2) M5 and M6 First, tighten it by hand, then give it an additional 1/6 turn with a wrench. Mounting Caution 1.
W/o auto switch With auto switch A 62.2 72.2 75 85 88 98 W/o auto switch With auto switch A 53 63 64.5 74.5 76 86 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore (mm) L1 L LX LT LS LH LG LD L L1 B 36 46 43.5 53.5 53 63 A B A 33.5 8 72.2 46 63 18 95 3.2 20 46 5 11 43.5 63 63 43.5 10 85
For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring).
Note 2) When "n" is an odd number, a multiple of 4 that is larger than this odd number is used for the calculation.
In such a case, it will be necessary to use ZSP1 that can detect a small hysteresis or a flow switch. Note) A vacuum generator with a large suction capacity will not be detected properly, so an ejector with an appropriate capacity must be selected. Since the hysteresis is small, vacuum pressure must be stabilized.
leakage from the rod section directly into the outside of clean room by relief port and making an actuators rod section having a double seal construction.
B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.
In such a case, it will be necessary to use ZSP1 that can detect a small hysteresis or a flow switch. Note) A vacuum generator with a large suction capacity will not be detected properly, so an ejector with an appropriate capacity must be selected. Since the hysteresis is small, vacuum pressure must be stabilized.
Port B Port MD 10 A A Port B Port A 10 (MI) View A-A Front mounting flange R Stroke ML MT Y + Stroke MH + Stroke ZZ + 2 stroke Series MGP MGPM, MGPL Common Dimensions MB MC (Width across flats) Bore size (mm) MA MB MC MH ML MD MP MT MD 12 16 20 25 32 40 50 63 80 100 28 29 34 40 52 60 68 84 114 140 16 19 30 30 38 38 50 50 50 65 14 14 22 22 27 27 36 36 46 46 22 22 30 30 37 37 47 47 58 62 9
9200-www.stevenengineering.com When tightening an auto switch mounting screw, use a watchmakers screwdriver with a grip diameter of 5 to 6 mm.
(Except NM1) Use the following part numbers to select a compatible motor flange option and place an order.
Use a speed controller to adjust the cylinder drive speed, gradually increasing from a low speed to the desired speed setting. 4. Provide an intermediate support for a cylinder with a long stroke.
Note) The -X126 model cannot be manufactured with an L plug connector for electrical entry. Therefore, use a grommet type or an M plug connector.
Note 2) In the case of the body ported type, the pilot type (VZ32R) is used exclusively on a manifold. An external pilot style that can be used individually is available as a made-to-order. For details, refer to the page 4-6-46.
Note 2) When n is an odd number, a multiple of 4 that is larger than this odd number is used for the calculation.
In such a case, it will be necessary to use ZSP1 that can detect a small hysteresis or a flow switch. Note) A vacuum generator with a large suction capacity will not be detected properly, so an ejector with an appropriate capacity must be selected. Since the hysteresis is small, vacuum pressure must be stabilized.
Do not use the actuator in an environment where there is possible danger of corrosion. 2. Install a protective cover on the entire product in an environment where a large amount of dust is present or where the product is exposed to water or oil drops. 3. Do not use the actuator in an environment where a strong magnetic field is present. Maintenance Warning 1.
Never use in an atmosphere of explosive gases. The construction of auto switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Do not use in an area where a magnetic field is generated. Auto switches will malfunction or magnets inside actuators will become demagnetized. 3.