Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS 1F-T AS1001F-23D-X214 AS AS-FE KE AS-FG AS-FP AS-FM AS-D AS-T AS-D AS-T ASP ASN AQ ASV AK VCHC ASS ASR ASQ 591
0.14 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !
ASV AK Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.
slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm Tolerance of metered flow 25 slpm N/A 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa) 2) At 80 psig (0.55 MPa) N2 110 Diaphragm Valve for Ultra High Purity Air operated type (Two Step) Series AP3571 & 4571 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary
Cooling Capacity: 100, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: AK (A + K)
Cooling Capacity: 100, Thread Type: Rc, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: AK (A + K)
Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)
Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)
Cooling Capacity: 100 (10 kW), Cooling Method: W (Water-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)
Cooling Capacity: 100, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A + K, UL Certification: -, Option 2: -
Cooling Capacity: 100, Thread Type: Rc, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A + K, UL Certification: -, Option 2: -
Cooling Capacity: 10 kW, Cooling Method: Air-cooled, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port
Cooling Capacity: 10 kW, Cooling Method: Air-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port
Cooling Capacity: 10 kW, Cooling Method: Water-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460-480 VAC (60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port
Cooling Capacity: 100 (10 kW), Cooling Method: W (Water-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)
Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.
ASV AK VCHC ASR ASQ Note) Use AS-FG series with -X214 for the throttle valve. 707
the same as those on pages 17, 18, 19 and 20.