Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)]

V

(i) Side Entry Single Sub-base for use with the Base Mounted Valve (Type 40). (ii) 2-10 Station Type 20 Mmanifold for use with the Body Ported Valve (Type 20). (iii) 2-10 Station Type 40 Side Entry Manifold for use with the Base Mounted Valve (Type 40). (iv) 2 10 Station Type 40 Bottom Entry Manifold for use with the Base Mounted Valve (Type 40).

Series AP3100

Specifications AP3600 AP3625 AP3650 AP3657 Operating Parameters Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Select compatible materials of construction for the gas Vacuum to 3000 psig (20.7 MPa) 4000 psig (27.6 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra

ASR

1 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ Air consumption reduction ratio (%) 40 Working stroke pressure (MPa) 40% reduction in air consumption 40% reduction in air consumption 30 0.9 0.7 20 0.5 10 0.3 Cuts air consumption by operating the return stroke at a reduced pressure.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size VCHC AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 ASS 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 ASR ASQ Note 1) L7: Reference dimensions Dimensions: AS5000 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9) 2

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AS32l1F-U02-12A 12 18.5 29.7 40 34.5 17 42 AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8 13.2 22.7 33 14.2 AS32l1F-U03-10A 10 15.9 26.7 37 28 15.6 40 AS32l1F-U03-12A 12 18.5 29.7 40 26.8 17 42 AS42l1F-U04-10A 10 1/2 24 15.9 18.8 27.4 40.3 36.2 50.8 49.2 42.2 40.6 15.6 52 AS42l1F-U04-12A 12 18.5 30.8 43.7 35.1 17 54 AS42l1F-U04-16A 16 23.8 34.8

Guide Cylinder Series MGG

145 23 400mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 145 23 500mm or more 20

Check Valve Series AK 1

AK ASS ASR Straight type Easily installed in pipe lines.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS1001FG-04-X214 ASV AK Needle Valve/Flow Characteristics VCHC Note) The flow characteristics are representative values.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Actuation is 90 degrees open to closed with a cutout window, on both sides of raised rectangular section, providing visual status of open or closed state. 260g 55 mm Direction of a raised rectangular section indicate open/close status Open Close Series AK CAT.NAS100-106A Series AK Diaphragm Valve Air Operated Type Manually Operated Type Series AK3542/AK4542 Series AK3652/AK4652 Body material

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

36.1 31.1 32.1 27.1 R 1/8 14.2 14.2 18 21 37.2 41.7 40.1 42.6 45.6 48.4 13.5 18.5 16 17 18.5 21 22.9 28.2 21.9 25.2 28.2 31 10.9 12.9 10.9 12.9 14 16.2 16.2 18.4 18.3 20.2 ASS 33 40.4 35.4 34.4 29.4 R 1/4 18.5 18.5 ASR 36 40 Reference dimensions for M5 and R threads after installation. 12.9 ASF Inch Size A M1 L5 Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS1001FG-04-X214 ASV AK Needle Valve/Flow Characteristics VCHC Note) The flow characteristics are representative values.

1

32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000 (25, 32) 2001 to 5000 (40) 2001 to 6000 (50, 63) REA 25, 32, 40, 50, 63 200 to 1000 (5), 10, 15, 20, 25, 30 35, 40, 45, 50, 75, 100 CQ2AH 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 6-17-31 27 Made to Order Common Specifications: Long Stroke Made to Order Common

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

Note 3) This is the default setting of the HRS150.
The operating settings can be changed by the user. The default setting for alarm code “AL09” is continued operation for the HRS012 to 060.

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.