Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: BKT (B + K + T)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: ABKT (A + B + K + T)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: BK (B+K)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AKM (A + K + M)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AB1KM (A + B1 + K + M)

Series AP3500

slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm Tolerance of metered flow 25 slpm N/A 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa) 2) At 80 psig (0.55 MPa) N2 110 Diaphragm Valve for Ultra High Purity Air operated type (Two Step) Series AP3571 & 4571 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary

Wedge Cam Operation Gripper Series MHK2

Material MHK2-12 MHKL2-12 MHK2-16 MHKL2-16 MHK2-20 MHKL2-20 MHK2-25 MHKL2-25 16 17 18 19 CR FKM Si Rod seal Piston seal NBR KT-MHK12 KT-MHK16 KT-MHK20 KT-MHK25 Piston retainer Tube seal P3318413 P3318413-1 P3318413-2 P3318405 P3318405-1 P3318405-2 P3318313 P3318313-1 P3318313-2 P3318305 P3318305-1 P3318305-2 P3318213 P3318213-1 P3318213-2 P3318205 P3318205-1 P3318205-2 P3318113 P3318113-1

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Both sdes (2 to 20 siaiions) '!

Precision Regulator

1 to @6.) 1 P36202018 P36202018 KT-IR1000 KT-IR2000 KT-IR3000 KT-IR2120 KT-IR3120 Note 1) The replacement parts are shipped with the repair kit number.

Industrial Filters

Models (mm) Internal volume (L) Number of arranged elements Weight (kg) Element length (L) Model N (Port size) G W A B C D E F H J K P 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 250 20 70 15 330 216.3 230 490 660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4

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Holes vns 20/30/40/50 Cornbination with a ,noduta. sayle FBL :;t.ti:l Combination with a modular style AC20 Ac:t0 VHS2O VHS3O VHS4O VHS5O An nterface pad is required attached 1o a modular FRL.

BP1000

0.14 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

BP1000

remelt SH Wetted Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 5.6'' MAX. (142) P OPTION 24 0.17 5.0'' MAX. (127) 22 0.15 1.50'' (38.1) 20 0.14 2.25'' (57.2) 18 0.12 16 0.11 0 20 40 60 80 100 Flow

Process Pump

-3 AN120-M5 KT-PB1A-5 24 VDC 0.35 W Note) With foot mounting screws (2 pcs.)

Series AP3100

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For

Booster Relay Series IL100

Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !8, !9 IL220 KT-IL220 Set of left nos. u, i, !1, !2, !4, !5, !

CATALOG

~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Courtesy of Steven Engineering, Inc. !

A

11104-5B NAW4000 11173-5B NAW5000 11074-5B NAW6000 Bracket B120 NAW1000 B220 NAW2000 B320 NAW3000 B420 NAW4000 Japanese N North American B O D Y S I Z E 10 M5 20 18 14 30 14 38 40 38 12 0 Standard 1 With Built-in Gauge 2 With Built-in Gauge for right to left flow (1 & 2 available for body sizes 20~40 only) P O R T T H R E A D O P T I O N A L S P E C S Rc(PT)* Remove (N) when ordering

Lock-Up Valve IL201/211/220 Series

Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !8, !9 IL220 KT-IL220 Set of left nos. u, i, !1, !2, !4, !5, !

Low Maintenance Filter Series FN1

20 05 05 -0 S0 S0 S0 0S 00080 N-1 N-1 80 N-1 -1 1N 101 101 101 110 FN1 FN1 FN1 FN Filtration efficiency (%) Filtration efficiency (%) 60 60 40 40 20 20 0 0 10 5 20 50 75 25 20 35 65 90 Particle diameter (m) Particle diameter (m) 3 Low Maintenance Filter Series FN1 Blocking Characteristics (Repeatability Characteristics) Fluid: Potable water Supply pressure: 0.2MPa Flow rate: 20l/min Test