Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Table of Contents

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

Vacuum System Peripherals:

Series ZM 13-14-20 4.

HRX-OM-X071

For HRR050-AF-20/40G thread adapter set 1 set For HRR050-AN-20/40NPT thread adapter set 1 set 1 In the case of option Z, not included.

Ionizer

Static Neutralization Characteristics 1) Installation distance and discharge time (Discharge time from 1000 V to 100 V) High speed static neutralization cartridge Air purge: Yes Supply pressure: 0.02 MPa (1 L/min (ANR) per nozzle) Air purge: No 30 45 25 40 60 Hz 35 1 Hz Discharge time (s) Discharge time (s) 1 Hz 20 30 15 Hz 5 Hz 25 15 20 Sensing DC 10 15 Sensing DC 1 Hz/60 Hz 60 Hz 30 Hz

VY511, VYU5

READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14 55 7.5 HAW75-20 AT55C-20 IDF55C-3 AM850-20 AM850-20 AMD850-20 75 10.0 HAW110-30 AT75C-20 IDF75C-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

ARJ1020F

MAX. 2.5t AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR Component Parts Replacement Parts No. Description Part no. 13434-30 No.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Series MHZ2 112210, 16, 20, 25 Air Gripper How to Order 11 Vacuum suction type Clean series 11 MHZ2 16 D M9N 22 MHZ2 16 D M9N Copper, fluorine and silicone-free + Low particle generation Bore size 10 16 10 mm 16 mm 22 Vacuum suction type 20 mm 20 25 mm 25 Action Number of auto switches Double acting D Nil 2 pcs. S 1 pc.

Lubrication Equipment

-l06 to 10 ALD900-l12 to 20 D.P.

PA3000/5000/PAX1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Compact Manometer Series PPA 1

MPa POWER LIGHT MPa POWER LIGHT 14-12-6 7 Compact Manometer Series PPA Dimensions Connecting tube port 40 20 Accessory One-touch fitting F.R.L. AV LOCK MODE(AUTO POWER OFF CANCEL) PPA100 AU LIGHT POWER AF BATTERY 1.5 Vx2 LR6, R6P MADE IN JAPAN AX AR X Refer to Note) LIGHT POWER Body IR Span calibration 110 VEX 180 + AMR + ITV Type AA dry batteries (2 pcs.)

Compact Manometer Series PPA 1

MPa POWER LIGHT MPa POWER LIGHT 14-12-6 7 Compact Manometer Series PPA Dimensions Connecting tube port 40 20 Accessory One-touch fitting F.R.L.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.