Air Slide Table

Dimensions [mm] X Metal stopper with bumper2 v v ZHF1 Rubber stopper v v ZHM1 Metal stopper v v ZLC1 Metal stopper Series X Y MM MQ MXQ6 20 11 M3 x 0.5 5 MXQ8 24 13 M4 x 0.7 6 MXQ12 29 17 M5 x 0.8 6 MXQ16 29 23 M6 x 1 10 MXQ20 35 28 M6 x 1 13 MXQ25 44 33.5 M8 x 1.25 15 Metal stopper with bumper2 v v ZLF1 Rubber stopper v v ZLJ1 Shock absorber/RJ v v Y 1 Only for use with a centralized adjuster

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

PFxx-OMS0001CN

) H1(H2) H1(H2) H1(H2) 0 ON 0 OFF () 0 ON 0 OFF () -29No.PF-OMS0001CN-A ( )OUT2 3 3 3 3 6 6 6 6 zhi chi ON OFF ON OFF OU2 -30No.PF-OMS0001CN-A <>OUT1 [F 1] [oUt1][()] [oU1] [] [1ot] [] 32 33 34 36 -31No.PF-OMS0001CN-A a.

RB/RBL/RBQ

Component Parts Material Bearing steel Fluoro rubber NBR NBR Polyurethane Treatment Description Outer tube Piston rod Piston Bearing Return spring Stopper Material Rolled steel Special steel Special steel Description Check ball Accumulator Rod seal Scraper Bumper Treatment Black nickel plated Heat treated, Hard chrome plated Heat treated No. q w e r t y No. u i o !0 !

Compact and Lightweight

ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

•

. +' ) PH otport 4' ; ~Y!l1bOl Cylir!

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water)

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

Table of Contents

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

reduced facilities investment, space saved facility water facilities, and reduced running cost.Circulating fluids type: fluorinated, ethylene glycol aqueous solution, and clean/DI water, Temperature range setting: 20 to 90 °C, Cooling capacity: 2 kW, 8 kW, 15 kW, and 30 kW, Temperature stability: ±0.3 °C, Ideal for ordinary temperature and high temperature processes, Front Panel for HRW008

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Aluminum High Vacuum Angle Valve

Note 2) A coating of vacuum grease [Y-VAC3] is applied to the valve seat of the vacuum part.

SY

Note 3) DIN43650C standard DIN terminal "Y" is also available.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

AS ASP ASN AQ ASV Dimensions AK Universal type Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 A M1 Max. Min. Max. Min.

17

Center of Gravity x z z y x y z MY1H Center of gravity Mass m Work piece X-axis Y-axis Z-axis Refer to page 1230 for wall mounting, ceiling mounting and vertical mounting types.

Shock Absorbers and Rate Controls

'ho.k tor.e ( l (h(l ltlax. t{m/hour (h) llox. l{n/(y(le 'II (nml ts) Strole (nm) Itlodel Weighl {cl Ixtended ( ) (ompreried (N) 0Et[.Iln(B) 6.1 7.0 0.3.3.30 5.5 l?.