Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N+Z

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Z

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Z

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N+Y

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y+Z

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: NPT Fitting

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y+Z

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+D+N+W

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Vertical mounting x z y x y z Wc: MHL2-16D1 (795 g) Wa: Connection plate t = 10 (880 g) Wd: Workpiece (500 g) Refer to page 1230 for wall mounting, ceiling mounting and vertical mounting types. 2.

F

Applicable Connection Model T H1 H2 L1 L2 Mounting M Minimum Tube OD Thread UNF (Width (Width Hole Hole Applicable Connection Model T (M) H1 H2 L1 L2 Mounting M Effective Tube OD mm Thread (Width (Width Hole Orifice (mm 2) Inch Rc(PT) Across Flats) Across Flats) Diameter Rc(PT) Across Flats)Across Flats) Nylon/Ureth 1/8 1/4 KQE01-35 1/2-20 17.46 17.46 31.5 15 14 15.5 2.5 3.2 14 KQE23-02 M12x1

Air Fittings & Tubing

H2 (Hex.)

PFxx-OMS0001CN

) H1(H2) H1(H2) H1(H2) 0 ON 0 OFF () 0 ON 0 OFF () -29No.PF-OMS0001CN-A ( )OUT2 3 3 3 3 6 6 6 6 zhi chi ON OFF ON OFF OU2 -30No.PF-OMS0001CN-A <>OUT1 [F 1] [oUt1][()] [oU1] [] [1ot] [] 32 33 34 36 -31No.PF-OMS0001CN-A a.

LV50-OMQ0002

) Hysteresis H1(H2) n1L (n2L) n1H (n2H) Instantaneous flow Accumulated increment output mode Count up from "0".

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

PFxx-OMJ0005CN

) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -

Table of Contents

m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0