SFOD-OMT0009CN

200 mm/s mm/s <> 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 2) AWG20 (0.5mm USB JXC-W1-2 -USB DC24V M PWR JXC-W1 2) C PWR DC24V 2) () <> 1.5m () 2) AWG16 (1.25mm JXC-C1 1) 2)PLCDC24V 12.

JXCx-OMT0001CN

200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 <> 2) AWG20 (0.5mm USB JXC-W1-2 DC24V USB M PWR 2) JXC-W1 C PWR DC24V 2) 1.5m () <> JXC-C1 2) AWG16 (1.25mm 1) 2) PLC5 EtherNet DC24V 3) P1 P2 EtherNet/IP 14 USB (JXC-W1-2) 34 CI3 4Modbus -9No.JXC-OMT0001CN-C 3.

EX500-GPR1A.eng

For GW unit Manifold valve Input unit manifold configuration NOTE When no Input unit is connected to the connector ( C1 ) or ( 0 ) of SI unit, mount a terminal plug on the connector.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

LEC-OM02904

(MR Configurator2 TM) 4 7 4 4.4 4.2 4.5.2 JOG 4.5 JOG TM) (MR Confignrator2 4.5 (EM1) TM (MR Confignrator2 JOG 4 8 4 TM) 4.5.1 (MR Configurator2 (SW2-1)SSCNET (1) (A) JOG JOG ON/OFF (MR Confignrator2 TM)JOG [r/min] 200 0 [ms] 1000 050 ON OFF (b) ON/OFF (MR Confignrator2 TM) [pulse] 262144 09 [r/min] 200 0 [ms] 1000 050 (CCW)(CW) (CCW) (CCW)(CCW) (CW) (CW)(CCW) (CW)(CW) [s

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

64.5 4 16 54.5 5 C1 4 x 22l SWRM B E 80 80 all types Polished round 18SPCC 71.5 4 16 61.5 5 A 5 x 30l SWRM 100 Polished round 20SPCC 100, 125 all types 82 5 20 72 5 5 x 30l SWRM 160 Polished round 22SPCC 160 all types 94 5 20 79 7.5 Knuckle Material: Carbon steel d (H8) L (F8) Applicable cylinder type Order no.

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

MQQ

C J G5-S 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Weight/Standard Type: MQQT Supply pressure 0.3 MPa CV 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa (g) Note 1) Use clean, dry air with no freezing.

MQQ

Piston speed (3) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage MQQ M 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa RHC Note 1) Use clean, dry air with no freezing.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

With rod end male thread: MQQ-DM Rod end nut H1 (mm) Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 30 40.5 22.5 M14 x 1.5 28.5 40 40.5 22.5 M14 x 1.5 28.5 Refer to page 9 for details regarding the rod end thread adapter and the rod end nut. 5 Compact Low Friction Cylinder

Compact Cylinder with Lock Series CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Table of Contents

Refer to pages starting with 140 for mounting. 18 T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire LC1-1B1H1100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230

CATALOG

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CX CZ L RR 25 15 to 100 14 20 18 36 14.5 10 105 to 200 32 20 to 100 14 22 18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) * The A and CL measurements are when the unit is in the Z-phase first detecting position.

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

Battery-less

30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 1 1.14 1.37 1.66 1.83 1.7 1.89 2.21 2.63 2.97 3.31 3.57 2.95 3.21 3.76 4.32 4.99 5.48 5.92 Series LEYG16LmE LEYG25LmE LEYG32LmE Stroke [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 1.01 1.14 1.31 1.6 1.75 1.71 1.92 2.16 2.59 2.85 3.17 3.41 2.95 3.22 3.61 4.16 4.7 5.21

A

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

15

. speed = 200 mm/s or less !

Integrated Controller

L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20