Free Mount Cylinder

86.0 51.6 172 IN -XB9 Low speed (10 to 50 mm/s) 220 157 94.2 314 OUT -XB13 Low speed (5 to 50 mm/s) 20 8 185 132 79.2 264 IN -XC19 Intermediate stroke (with a spacer built-in) 344 246 147 491 OUT -XC22 Seals made of fluorine rubber 25 10 288 206 124 412 IN Refer to Pneumatic Clean Series catalog for clean room specifications. 563 402 241 804 OUT 32 12 454 346 207 691 IN Tightening Torque

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Power saving circuit is only available in the "Z" type. Power saving circuit is not available in the case of "W" type.

MGG

442 491 491 OUT 25 10 82.4 124 165 206 247 288 330 371 412 412 IN 161 241 322 402 482 563 643 724 804 804 OUT 32 12 138 207 276 346 415 484 553 622 691 691 IN 252 378 504 630 756 882 1010 1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180

ZP

(If the devices are connected in series in the vacuum line, their conductances must be combined.)

ISO Cylinder

( ) is in cases with air cushion. * The value in [ ] is in cases of CD85F16, CD85Y. * D-A9l type cannot be mounted on bore size 8, 10, or 12 cylinder. * Adjust the auto switch after confirming the operating conditions in the actual setting. * The value in ( ) is in cases with air cushion. * The value in [ ] is in cases of CD85F16, CD85Y. * D-A9l(V) and A79W types cannot be mounted on bore

REA/REB

Area C in the case of 15.

VQC

in alphabetical order.

REA/REB

Area C in the case of 15.

MLGP

Spring washer (nominal size 3) 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 40, 50, 63, 80, 100 BMG1-040 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161 804 OUT 16 32 603 543 482 422 362 302 241 181 121 603 IN 1257 1131 1006 880 754 629 503 377 251 1257 OUT 16 40 1056

MLGP

Spring washer (nominal size 3) 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 40, 50, 63, 80, 100 BMG1-040 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161 804 OUT 16 32 603 543 482 422 362 302 241 181 121 603 IN 1257 1131 1006 880 754 629 503 377 251 1257 OUT 16 40 1056

Air Cylinder

Built-in Magnet Cylinder Model CA2 If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

CLQ

Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch spacer Auto switch mounting nut 2 Series CLQ OUT IN Theoretical Output Unit: N Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 71 94 113 147 181 241 317 377 495 589 841 935 1360 1510 2140 2360 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 118 157 189 245 302 402 528 628 825 982 1400 1560 2270 2510 3570

2–4

125 143 162 180 198 216 OUT 94 157 220 32 0553 0669 320 343 366 389 182 205 228 250 274 297 IN 113 189 264 25 40 0692 0823 421 446 471 497 269 295 320 345 370 396 OUT 147 245 344 50 1133 1341 701 740 780 821 500 540 580 620 661 IN 181 302 422 32 With auto switch (built-in magnet) OUT 241 402 563 Unit: g IN 317 528 739 Cylinder stroke (mm) Bore size (mm) 5 40 OUT 377 628 880 10 100 40

Table of Contents

Contact SMC in this case.

CXWM/CXWL

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-26-8 7 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type Specifications Built-in shock absorber This is a built-in shock absorber style in which the shock absorber is enclosed in the housing.

Table of Contents

MRQ D20The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 4-2 of Example 4. The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 3-2 of Example 3.

Shock Absorbers and Rate Controls

Flange and Lock Ring All dimensions in millimeters.

5 Port Solenoid Valve, Series VQC

the specification sheet in the case of CM and LM.

Table of Contents

86.0 51.6 172 IN -XB9 Low speed (10 to 50 mm/s) 220 157 94.2 314 OUT -XB13 Low speed (5 to 50 mm/s) 20 8 185 132 79.2 264 IN -XC19 Intermediate stroke (with a spacer built-in) 344 246 147 491 OUT -XC22 Seals made of fluorine rubber 25 10 288 206 124 412 IN Refer to Pneumatic Clean Series catalog for clean room specifications. 563 402 241 804 OUT 32 12 454 346 207 691 IN Tightening Torque

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Model I Action Mounting bracket Double clevis t e (0 ,double knuckle oint on Standard type CS2 CS2Y Chan arts Clevis in, knuckle in, s lit in Double acting single rod ' I. ' , .