Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

JXCx-OMT0023

Servo amplifier Driver Approx. 100 PP PG (Note) Approx. 100 NP NG SD Note. Pulse train input interface is comprised of a photo coupler. Therefore, it may be any malfunctions since the current is reduced when connect a resistance to a pulse train signal line.

VKF300

) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc 1/8 1(P), 3(R) port Manual override (Non-locking) Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 2-4.5 (Mounting hole) 67.5 59 19 17 2 R P P R mPm 7 20 34 2.3 Pg.7 4-Rc 1/8 1(P), 3(R) port A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 300 (Lead wire length) n-Rc 1/8, M5 x 0.8 2(A) port 7 20 34 Courtesy of

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84

Mechanically Jointed Rodless Cylinders

(mm) Fitting type Fitting model Cylinder model size Connection thread Cylinder model size Connection thread Male connector Male elbow Male connector Male connector Male elbow 4 KJH23-M5 KJL23-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KJL04-M5 KQ2L04-M5 KQ2S04-M5 KQ2L06-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KQ2H04-M5 KQ2L04-M5 KQ2S04-M5 KQ2H06-M5 KQ2L06-M5 KQ2S06-M5 KQ2H23-01S KQ2L23-01S KJH04-01S KJS04-01S

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

MY1

GA (Hexagon socket head plug) TT UU (Hexagon socket head plug) G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 1.1 (WW) QQ (Hexagon socket head plug) (WW) M5 x 0.8 M5 x 0.8 GA PP (Hexagon socket head plug) (Port) XX XX G Centralized piping type Centralized piping type 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) VV VV (Hexagon socket head plug) S WX 8.4 Bottom ported (Applicable

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

A Black zinc chromated MY-16B-Stroke B Nickel plated MY-16BW-Stroke 8-12-17 18 Series MY1W Dimensions: 16, 20 L (LL) 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW PG Q+ Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) W CH LH RR SS NE H RR SS QQ NH NC M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) 2 x 2-M5 x 0.8 PP TT UU This port

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

SX

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

SZ3000

Stations Scale: 37% Stations [With external pilot] 2n1-M5 x 0.8 (A, B ports) 24 13.3 (Pitch) P=10.5 13.3 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting 2-One-touch fitting 2n2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 (P, R ports) Applicable tube O.D.: 8 (A, B ports) Applicable

MY2

If driving a load such as a relay that generates a surge voltage, use a contact protection box. Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if the surge is applied repeatedly.

Mechanically Jointed Rodless Cylinder Series MY2

F E D A 60.6 95.9 121.5 B 64.6 97.5 121.5 C 70.6 107.9 134.5 H 3.4 4.5 6.6 E 15 25 45 F 26 38 64 G 4.9 6.4 11.7 D 77.2 115.5 145.5 Model MYC-S16A MYC-S25A MYC-S40A Applicable cylinder MY2C16 MY2C25 MY2C40 A set of side supports consists of a left support and a right support.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center/exhaust center/pressure center 3 position closed center 3 position exhaust center 2 4 (A) (B) 2 4 (B) (A) o t r e w y q !1 u !