Slider Type Ball Screw Drive/11-LEFS Series

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

HRX-OM-X071

,T2Inverter pump 6.3.1 Option T1, T2Inverter pump With option T1 or T2, the pump output set value can be changed.

42

(For F, L, S, T & T1 kits) D-Side End Plate Assembly 2. U-side end plate assembly part no.

Title not found

5/8 15/16 1 5/16 1 33/64 4 T5 T2 T1 T3 T3 1/2 not shown T4 T8 T6 T7 Page 1 Distributed by Power Aire, Inc.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Positioning Operation Pushing Operation ON OFF ON OFF IN IN Input Input 15 ms or more Output the step data no. 15 ms or more Output the step data no.

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

Fluoropolymer Piping Equipment

25 8 5.5 LQ1E61-R5 25 6 15 15 51 42 16.5 3.6 (E1) C1 Note) Products marked are produced upon receipt of order.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 15 for changed part. Number corresponds with the parts number on the construction drawing.

1

2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) CQ2 CQS Luberetainer D-M9lV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) JA D-M9l D-A9l 10 (5) Note 5) 10 15 + 15 (n 2) (n = 4, 6) Note 4) MXH D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) MXQ D-M9lW 15 (10) Note 5) 15 20 + 15 (n 2) (n = 4, 6) Note 4) MGP D-M9lA 15 (10) Note

Compact

T1 = V/a1 = 1000/2500 = 0.4 [s], T1 T2 T3 T4 11LEJS T3 = V/a2 = 1000/2500 = 0.4 [s] L: Stroke [mm](Operating condition) V: Speed [mm/s](Operating condition) a1: Acceleration [mm/s2](Operating condition) a2: Deceleration [mm/s2](Operating condition) T = T1 + T2 + T3 + T4 [s] L 0.5V(T1 + T3) V 25AT2 = T1: Acceleration time and T3: Deceleration time can be obtained by the following equation

Table of Contents

(Refer to pages 15-6-3 to 15-6-5 for details.)

Electric Actuators

-02 Performance/Specifications General specifications LC5-1-T1-02 Part no.

Stability of suction position,

Adsorption Response Time with the Formula Adsorption response times T1 and T2 can be obtained through the formulas given below.

SX

M3 Terminal screw Rail stopper TXE1-SMC Transmission terminal Manual override 17 12 13 14 15 16 15 16 A: Orange B: Green Stations n 10 stations 11 12 13 14 15 16 stations 298 298 310.5 323 335.5 348 360.5 L1 L2 L3 L4 (Rail mounting hole pitch 12.5) 287.5 287.5 300 312.5 325 337.5 350 192 202.5 213 223.5 234 244.5 255 17 11.5 12.5 13.5 14.5 15.5 16.5 1-6-128 129 Made to Order Specifications

VQ5000

Note 2) Splash proof specification is not available for F and T1.

SY

(Max. 20 stations) Applies to 45T/T1 only. 24VDC only for type S.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Time [s] Method 2: Calculation T1 T2 T3 T4 T5 T6 Cycle time T can be found from the following equation. L : Stroke [mm] V : Speed [mm/s] a1: Acceleration [mm/s2] a2: Deceleration [mm/s2] T = T1 + T2 + T3 + T4 [s] Calculation example) T1 to T4 can be calculated as follows. T1 and T3 can be obtained by the following equation.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 2) Splash proof specification is not available for F and T1.

Environment

L Speed: V [mm/s] Cycle time T can be found from the following equation. a1 a2 T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 = V/a1 [s] T3 = V/a2 [s] T1 T2 T3 T4 T2: Constant speed time can be found from the following equation.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.