Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: w/o Lead Wire, Option 2: None, Option 3: Operation Manual, Calibration Certificate

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: None, Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: w/o Lead Wire, Option 2: None, Option 3: Operation Manual, Calibration Certificate

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: None, Option 3: K (Operation Manual, Calibration Certificate)

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

44

Swivel Elbow KFG2V Metric Inch P. 324 P. 329 Metric Inch P. 325 P. 331 KDM KB KR KA KQG2 Straight Union KFG2H Female Connector KFG2F KG Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 KFG2 KFG2 MS KKA KP LQ Union Tee KFG2T Union Nut KFG2N MQR Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 T IDK 321 Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread

Micro Mechanical Valve Series VM1000

12 14 VMG 3 (EB) 1 (P) 5 (EA) VR 0.5 MPa supply VR51 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5

Dual Speed Controller with One-touch Fitting Series ASD 1

Effective area (mm2) 7.6 9.1 10.7 18.3 19.8 2.7 4.5 1.1 5.3 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-14 2 Dual Speed Controller with One-touch Fitting Series ASD How to Order ASD 3 30F 01 06 S K Option Body size Nil K None Hexagonal lock nut 2 3 4 5 6 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard With seal Type 3 Universal Applicable tubing O.D.

Series AS-FM/AS-M/ASD-FM

Max. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 12.7 9.6 22.1 12.3 17.3 8 7 30.1 25.1 28.8 33.8 10-32UNF 16.5 13.5 26.1

PFxx-OMJ0005CN

01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) Stroke (mm) Vacuum entry direction Vertical Male thread M18 x 1.5 M18 x 1.5 M22 x 1.5 (Rc, NPT, NPTF) 100, 125 25, 50, 75, 100 40 to 80 25, 50, 75 Mounting Connection ZX 40, 50 63, 80 100, 125 0 stroke 6.9 N 11.8 N Full stroke 0 stroke 10 N 15 N Full stroke Thread dia.

AS-FG/ASD-FG

P-77.5 (YG)

Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8)

AN

Specify N after ANm03-. (Ex.: AN103-N01) Note) NPT thread is also available. Specify N after 25mm-.

IR30-OM00013

2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Option 1: w/o Lead Wire, Option 2: None, Option 3: Operation Manual, Calibration Certificate

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: None, Option 3: K (Operation Manual, Calibration Certificate)