PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

AN

Specify N after ANm03-. (Ex.: AN103-N01) Note) NPT thread is also available. Specify N after 25mm-.

IR30-OM00013

2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

100

With unit switching function (Initial value psi)*1 * For output types N and P, a 3-core lead wire is included.

Vacuum Pad: Ball Joint Type

N M5 x 0.8 Hexagon width across flats 8 NL 5 Y Hexagon width across flats 12 Hexagon width across flats 10 F Hexagon width across flats 3 F Hexagon width across flats 2 D 3 D C C 2 2 A A B B Dimensions Dimensions (mm) (mm) N: 1/8 (Rc, NPT, NPTF) A B C D F Y N: M5 x 0.8 N: M8 x 1.25 Model A B C D Model ZPT10F-B5 F NL P F NL P F P 10 12 10 12.5 27 1.5 ZPT13F-B5 ZPT20F20 22 13 15 32 36 36 12.5

IR10-OM00007

M Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 12.3 22.1 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

IR1000/2000/3000

VE Ozone resistant VY1 IRM 10 3 G 4 For High/Low Temperature Environments Set pressure and quantity Stations G 0 1 2 0.2 MPa setting 1 to n pcs. 0.4 MPa setting 1 to n pcs. 0.8 MPa setting 1 to n pcs. 2 2 stations Standard model no.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

NARM Series

-P10-N01 Blanking plate kit 136114A 136214A (plate, screws, and o-ring) Manifold base, 13612-*-N 13622-*-N Common IN (A1, A2) Manifold base, 13613-*-N 13623-*-N Individual IN (B1, B2) * Denotes number of stations: 2~10 available. 10 10 station NARM2000-4B2 Note1) In case of A1 and B1, a pressure gauge or a plug is mounted at the body side, while in case of A2 and B2, at the manifold side.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Table of Contents

W K CY1RG50/63 HB HC N X MX H MTS CB HA 2-P (Piping port) 4-J x E (Depth) 4-Counterbore dia.

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Smooth Cylinder/Low Speed Cylinder

(Rc, NPT, G) 2 x NN (Effective thread length 2 x FL) H1 H2 Width across flats KA D I 2 x LC LH B 4 x LD MM N N X X LX LZ Y Y Z Width across flats NA S + Stroke LS + Stroke ZZ + Stroke Width across flats B2 LT (mm) AL B B1 B2 D F FL G H H1 H2 I K KA LC LD LH LS LT LX LZ MM N NA NN P S X Y Z A ZZ Bore size (mm) 20 15.5 13 26 10.5 5 8 6.8 102 3.2 M8 x 1.25 M20 x 1.5 131 40 8 13 8 41 28 5 6 4

Table of Contents

(N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

MY1

PP2 QQ LH RR1 SS RR2 SS H NH NC Auto switch magnet holder G G TT UU TT UU P (Port) P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) Cushion needle GB MW A N 2-P (Hexagon socket head taper plug) Z + Stroke 2 x 2-J depth K P (Port) P (Hexagon socket head taper plug) XX (WW) XX (WW) P (Hexagon socket head taper plug) P (Port) VV VV 2-ZZ (Hexagon socket head taper plug

5

K 4 x J B1 4 x J B1 F F 4 x LD 4 x LD D D E E B C B C LY LH LY LH Width across flats KA Width across flats KA LT LT ZZ + Stroke LS + Stroke S + Stroke N X Y ZZ + Stroke LS + Stroke S + Stroke N X Y N X Y N X Y LX C B LX C B (mm) Bore size (mm) A AL B B1 C D E F G H H1 J K KA LD LH LS LT 40 30 27 60 22 44 16 32 10 15 51 8 M8 x 1.25 6 14 9 40 138 3.2 50 35 32 70 27 52 20 40 10 17 58 11 M8

A

S I O N S S I D E S U P P O R T U N I T C O U N T E R B O R E D (S I D E S U P P O R T A) D I M E N S I O N S S T R O K E A D J U S T I N G U N I T Stroke adjustment unit Absorber stroke Shock Absorber D I M E N S I O N S S I D E S U P P O R T U N I T TA P P E D (S I D E S U P P O R T B) Cushion screw Model h EA EB EC ED EY FA FB FC FF FH TA TT ML2B25 3.5 10 20 6.5 60 53.5 46.7 33 13 6 12

CQ2

Refer to p.2.3-18 for rod end nut and optional bracket.