Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: (None 75 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: A (AN10-01, 62 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Table of Contents

Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

1

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CG1 v CJ2l-lA MB V v v v Note 8) 10-, 11CA2 CQ2 CQS v v v v v v v v v v v 25ALuberetainer 20JA v v v v v v v v v XB6 MXH v v v v v v v v XB7 MXQ v XB9 MGP XB13 CY CX v v v v XC3 CK1 C(L)K v v v v v v v XC8 C(L)KU v v v Note 9) XC9 CKQ v v v v v v v v v XC10 CKZ2N v v v Note 9) XC11 WRF v v v v v v v v

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I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

ZSE30A(F)/ISE30A

Pressure Momentary change Set-value P-1 H-1 t (ms) t (ms) Time Switch output operation in normal conditions ON OFF Time Switch output operation when anti-chattering function is on. ON OFF Time J Power-saving mode (F7) Power-saving mode can be selected. It shifts to the power-saving mode without button operation for 30 seconds.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

IR30-OM00013

SU P.

IR10-OM00007

SU P. PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 0050. 2 M Pa M AD E I N J APAN So G No.

IR20-OM00008

M AX.SUP.PRESS. 1.0 M Pa OUTPUT PRESS. 0.0050.2 M Pa M ADE I N J APAN G So No. o S o1 T P2 U Q3 V R4 W Z12 -6- 5 (1) 1/4 1214 (2) (3) (4) -7-7- (1) (2) (3) (4) 1 2 3 (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 -8- (1) (2) (3) 21Nm (4) (ONOFF (5) 79Nm (6) (7) (1) (AF ) AMAFM (2) 1( 2 1.5 (1) -9- 6. (1) 1 1.5 (2) , (3) a. b. c.

Pneumatic Positioner IP300/IP3100

Steel) 4w 1P300.1P3100 DIMENSIONS MODEL 1P300 (Lever Type) l t I I I J J O

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603)

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: A (AN10-01, 62 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing)

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: (None 75 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603)