Vacuum Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8
Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8
The spacing (L) of the intermediate supports must be no more than the values shown in the following graph. 25 LEMH32 20 Load mass m [kg] LEF m 15 LEJ LEMH25 L 10 LEL 5 LEM LEM m 0 0 200 400 600 800 1000 1200 1400 L LEY Support spacing L [mm] m LES 25 LEPY LEPS L L LEMHT32 20 Load mass m [kg] LER 15 LEH LEMHT25 m m 10 LEY -X5 L 5 11LEFS 0 0 200 400 600 800 1000 1200 1400 11LEJS Square nuts
1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke
to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !
5 2r2 = m 4 r2 CRQ2 = m 12 a2 + b2 MSQ MRQ 10.
) MXSIL Series Dimensions MXS 12 L /Symmetric type ZZ Z Basic type 0.5 28.5 32 8 M 4H9 3.5 deep +0.030 0 N 16 -1 X F 2 2-M5 X 0.8 thread 8 deep 4-M4 X 0.7 thread 6 deep 16 F 4H9 3.5 deep +0.030 0 15 (With stroke adjuster at extension end) 50 28 38 20 5 1 N-M4 X 0.7 thread 5.5 deep (Helisert) 5 9 Stroke adjuster at retraction end 31.5 (With stroke adjuster at extension end) Stroke adjuster
02 22 M L For positive pressure ZSE50 02 M F 22 L For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping
L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
LV E D I M E N S I O N S (N)VM1000 R O L L E R L E V E R A C T U AT O R 00 Basic Type 01 Roller Lever 02 One way Trip 08 Toggle 32 Push Button P U S H B U T T O N C O L O R R Red G Green B Black S Y M B O L S (N)M1000 B A S I C VA LV E S Y M B O L S (N)VM1000 R O L L E R L E V E R D I M E N S I O N S (N)VM1000 O N E W AY T R I P D I M E N S I O N S (N)VM1000 T O G G L E D I M E N S I O N
ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
Nil L Z N 0.5 m 3 m 5 m None (Example) A73C (Example) A73CL (Example) A73CZ (Example) A73CN Refer to page 11-11-36 for detailed solid state switches with prewire connectors. Since other auto switches are available other than those listed above, refer to page 11-10-16 for details on other applicable auto switches.
AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.
ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8
06, 07 10 6 4 500 5 2 0 5 10 0 0 0 5 10 Needle rotation (Turns) Needle rotation (Turns) 4.1-14 Series ASD Dimensions/Metric Applicable tube O.D. d ASD230F ASD330F/430F ASD530F/630F Applicable tube O.D.d L2 L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Metric L4 L5 A1 A2 M MAX.
m P 0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment
flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.
0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8