Air Slide Table

A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Hydraulic

: Cast iron 2-P keeper plate mounting screw Rod series Bore size (mm) Part no. l J P H A B C D d K L E 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90

High Vacuum Angle Valve

Nil Symbol Mounting position Flange side Left flange surface Rear flange surface Flange side Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Symbol Nil K L Nil L M K L M Pilot port direction M9N(M)(L)(Z) D-M9N(M)(L)(Z) Left flange surface 1 Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9B

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

5

+ l l f K A AL CX F N N CT MQ CB C H L RR S + Stroke RHC ZZ1 + l + Stroke ZZ + Stroke Z + Stroke RZQ Double clevis: CS2YD With rod boot Port G G V W Width across flats KA 4 x J 2 x P (Rc, NPT, G) CD hole H10 Axis d9 MM Cushion valve B D E e U Z1 + l + Stroke h + l l f K A AL CX N N CT F CZ L H S + Stroke C ZZ1 + l + Stroke RR ZZ + Stroke Z + Stroke CB (mm) Bore size (mm) A AL lB lC lCB CDH10

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

smcmaintenancepartslist

Model Option Bracket assembly Note 1) AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR10P-270AS AR10P-260S G27-10-R1 AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Note 3) Note 3) Set nut G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge

F

P R O D U C T S E L E C T O R 4 5 0 M A L E E L B O W : K Q K ( K Q 2 K ) Applicable Thread Model H D1 D2 L1 L2 A M Effective Weight Tube OD R(PT) (Hex) 0rifice (mm2) (g) (mm) Nylon Urethane 4 M5x0.8 KQK04-M5 8 10.4 8 17 14.5 26 16 3.4 3.4 4 4 1/8 KQK04-01S 10 10.4 10 17 20.5 32 16 3.4 3.4 10 4 1/4 KQK04-02S 14 10.4 10 17 24.5 34 16 3.4 3.4 19 6 M5x0.8 KQK06-M5 8 12.8 8 18 14.5 26 17 3.4

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

CV/MVGQ

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.

CV/MVGQ

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Stations 1 2 3 D side U side 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 152 141 130 119 108 64 97 53 86 31 42 75 175 162.5 150 137.5 125

Air Cylinder

Stroke H CM2 CM2 CM3 CG1 Width across flats KA Spring extend CG3 Effective thread length FL CD Width across flats B1 H1 P G NN Plug with fixed orifice JMB I MB D E CI MB1 MM AL A K CA2 F U L RR CX NA S + Stroke H + Stroke Z+1.2 0 + 2 x Stroke ZZ+1.2 0 + 2 x Stroke CS1 CS2 (mm) Bore size A AL B1 CD CI CX D E F FL G H H1 I K KA L MM NA NN P RR U 20 18 15.5 13 9 24 10 8 20 0 0.033 13 10.5 8

Table of Contents

plug connector (L) L plug connector (LZ) M plug connector (MZ) K plug connector (KZ) DIN terminal (DZ) M plug connector (M) 1.4 1.1 3 position pressure center Locking type (Tool required) VZS3000 Rc 1 4 Single Double 3 position (Closed center) Page With surge voltage suppressor K plug connector (K) 3-7-23 3 position double check Grommet (GS) 2.4 2.4 L plug connector (LS) M plug connector

SQ1000/2000

L RUN SERIAL UNIT L ERR.

MY1

head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA