ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

. 1 k PSE33 PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k DC (+) DC (+) (Brown) Analog output (Brown) Analog output Load Load (Gray) (Gray) + + Main circuit Main circuit Load OUT1 OUT1 12 to 24 VDC 12 to 24 VDC (Black) (Black) OUT2 OUT2 Load (White) (White) DC () Load DC () Load (Blue) (Blue) PSE31 NPN

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

One-touch Fittings

Face seal Sealant 1 A One-touch Fittings KQ2 Series Metric size Inch size 2 3.2 4 6 8 10 12 16 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Oval Type From P.5 V V V V V V Round Type From P.101 V V V V V V V V V V V V V V V Refer to the next page for details on the applicable tubing sizes of each shape.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

5 Port Solenoid Valve Series VQZ1000/2000/3000

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Circuit diagram with light AC circuit DC circuit 1 2 1 2 NL: Neon light R: Resistor LED: Light emitting diode R: Resistor NL R R LED Fitting and Silencer Part No. for P, R Ports

Table of Contents

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Table (3) Rated Voltage Electrical Option Class B Solenoid valve (Port size) Orifice symbol (diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Rated voltage S L Z VX21 Model VX22 VX23 Voltage symbol Voltage With surge voltage suppressor With light and surge voltage suppressor With light AC/ DC 01 ( ) 1 8 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 1 2 3 4 7 8 J 5

/

Conduit terminal U 100.5 E J D I M A C H L B F K N.C.

Modular Type Filter Regulator Series AW

(The SI unit type is provided for use in Japan.) 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Option Note 3) Symbol Nil B C D H Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) AW20(K) to 40(K) Description With bracket Float type auto drain (N.C.) Float type auto drain (N.O.)

AC Servo Motor Driver (Network card type ）

370 V TND10V-221KB (360[V]) Note 1.

LEC-OM02704CN

[] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

NCG/CG1

2-wire Diagnostic indication (2-color indication) Grommet B59W G59 G5P K59 G59W G5PW K59W G5BA G59F M9N M9P M9B M9NW M9PW M9BW M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 12 V Grommet 24 V Relay, PLC IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 2-wire Water resistant (2-color indication) Diagnostic output (2-color indication

SQ1000/2000

SSQ2000 1A 3 F0 01 !3 Includes gaskets.

SY

Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

Proposals for Energy Saving

roller Hard steel roller Roller plunger VM430-01-06 VM430-01-06S Polyacetal roller Hard steel roller Cross roller plunger VM430-01-07 VM430-01-07S Toggle lever VM430-01-08 VM-30AR Red VM430-01-30R VM-30AB Black VM430-01-30B Push button (Mushroom) VM-30AG Green VM430-01-30G VM-30AY Yellow VM430-01-30Y VM-32AR Red VM430-01-32R VM-32AB Black VM430-01-32B Push button (Extended) VM-32AG Green

60

V 48 V 230 V 24 V 12 V 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) AC Normally Open (N.O.)

KR

Principal Parts Material Body C3604BD, Flame resistant PBT (UL-94 standard V-0) C3604BD (Thread portion) Stainless steel 304 Stainless steel 304, Flame resistant PBT (UL-94 standard V-0) POM Stud Chuck Guide Collet Release button Seal, O-ring Flame resistant PBT, Flame resistant CR (UL-94 standard V-0) Cover (Option) Flame resistant PBT (UL-94 standard V-0) NBR 15-3-1 2 Series KR Model Male