Possible to transfer a workpiece at low-speed.

L1 L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1= L1 L1= Q1 = M Q1 K axis Q1 T axis (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 J axis Z axis (mm) 15 20 30 40 10 (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 40 30 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 3.3

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L2 = 6 Applicable shaft types: J, X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z X J Z Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 Q2 = M 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37

LEC-OM02704CN

-L MR-PWS1CBLM-A1-H MR-PWS1CBLM-A2-H LE-CSMCNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) (B) 10m 10m 2m 13.4 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) () () .

Integrated Controller

FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

240

side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5)

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .

MXQ

2.1 2.1 2.1 M5 x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

One-touch Fittings

[mm] 1 D1 Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2T04-M5G1 7 8.2 7.7 10 7 15.4 14.8 15.9 13.3 4.5 4.5 2.5 3.9 6 M5 x 0.8 KQ2T06-M5G1 7 10.4 9.7 12 7 14.5 16.5 18.7 13.3 4.5 4.5 2.5 4.4 L1 L1 M M Oval type A L2 4, 6 1: D1 is maximum diameter.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

) Temperature characteristics Standards Compliant with CE marking, UL (CSA) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 TSJ 1/4 Port size Rc 1/8 URJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Material Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316L PSE56-: Oil proof heavy-duty vinyl cable with air tube, 3 cores, 5.1, 3 m, Conductor

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRB2 L1= CRBU2 L1= Q1=M Q1=M Q1=M L1= Q1=M L1= CRB1 W1= Q1 MSU L1 Q1 Q1 Q1 L1 L1 J axis X axis L1 K axis T axis CRJ L3= L1= (mm) (mm) X= Size Size 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Electric Rotary Table

80 mm (Rectangular plate) Rotation angle : 180 Angular acceleration/ angular deceleration : 1,000/sec2 Angular speed : 420/sec Load mass (m): 2.0 kg Distance between shaft and center of gravity H: 40 mm a b Step1 Moment of inertiaAngular acceleration/deceleration LER30 Formula q Calculation of moment of inertia 0.030 = m x (a2 + b2)/12 + m x H2 Moment of inertia: (kgm2) LER30K High torque

Environment

4 mm) LEJ Vent hole Note 3) V EV J LEL M PA LEM M U D LEY K Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25

S Couplers Series KK/KKH/KK13

x 1.5 24.5 32 62.6 16 13.0 25.0 106.2 125.0 171 Series KK Dimensions/Socket (S) Male thread type (mm) Effective area mm2 L1 Min. bore size A1 Body size H Width across flats A2 When connected T Connection port size Mass g L2 When connected KK2 Model D A2 T KK2 A1 8 2.5 24.7 KK2S-M5M 26.2 23.7 M5 x 0.8 6.1 3.8 21.7 10.0 M5 10 4.7 24.4 -01MS 25.9 22.8 R 1/8 9.1 5.8 6.0 36.6 KK3S-01MS 39.1

CHKD/CHKG

CHKDB50 -5 (M) CHKDB20 -5 (M) 70 CQ-M10 x 70L 55 CQ-M5 x 55L CHN -10 (M) -10 (M) 75 x 75L 60 x 60L -15 (M) -15 (M) 80 x 80L 65 x 65L CHM -20 (M) -20 (M) 85 x 85L 70 x 70L CHS -25 (M) -25 (M) 90 x 90L 75 x 75L 12.4 -30 (M) -30 (M) 95 x 95L 80 x 80L 15.8 CH2 -35 (M) -35 (M) 100 x 100L 85 x 85L -40 (M) -40 (M) 105 x 105L 90 x 90L CHA -45 (M) -45 (M) 110 x 110L 95 x 95L -50 (M) -50 (M) 115 x

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1

Table of Contents

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 R 44 53 62 76 95 NB TB 8 8 10 10 12 Q 11 12 14 17 20 O 4.5 4.5 5 5.5 6 SC 8 9.5 9.5 17 23 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M 2 2 2 3 4 NA 16 18 20 26 30 NC 10 10 12 14 16 SA 4.5 5.5 5.5 6.6 6.6 SB 8 9.5 9.5 11 11 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 UB 6 10 10 12 12 VA VB 3 4 4 5 6 L Model MHSL3-32D MHSL3-40D MHSL3-50D MHSL3-63D

CATALOG

10 15 15 M 8 x 1.25 6 M 14 x 1.5 27 1/4 84 8 50 ~ 600 20 ~ 600 32 35 70 52 20 40 10 17 17 M 8 x 1.25 7 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40 1/2 126 0 Bore Size (