Compact Hydraulic Cylinder Series CH
KGB

Mounting bolt D C D D C Model Mounting bolt C Model Mounting bolt M10 x 80l CHKGB20 M5 x 55l 80 CHKGB50 5 (M) 5 (M) 55 x 85l x 60l 85 10 (M) 10 (M) 60 x 90l x 60l 90 15 (M) 15 (M) 65 x 95l x 70l 95 20 (M) 20 (M) 70 x 100l x 75l 100 25 (M) 25 (M) 75 12.4 x 105l x 80l 105 30 (M) 30 (M) 80 15.5 x 110l x 85l 110 35 (M) 35 (M) 85 x 115l x 90l 115 40 (M) 40 (M) 90 x 120l x 95l 120 45 (M) 45 (M)

Compact Hydraulic Cylinder

CHN CHQB20-5D (M) CHQB63-10D (M) CQ-M5 x 55L CQ-M8 x 95L 55 95 CHM -10D (M) -15D (M) x 60L 60 x 100L 100 -15D (M) -20D (M) x 65L 65 x 105L 105 CHS -20D (M) -25D (M) x 70L 70 x 110L 110 -25D (M) -30D (M) x 75L 75 x 115L 115 7 CH2 -30D (M) -35D (M) 15.5 x 80L 80 x 120L 120 -35D (M) -40D (M) x 85L 85 x 125L 125 CHA -40D (M) -45D (M) x 90L 90 x 130L 130 Related Products -45D (M) -50D (M) x 95L

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l M8 x 95l x 100l x 105l x 110l x 115l CHQB63 10D (M) 5D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100

This is a legacy product, and replaced byZSE2-01-55L

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. ISE2 PRESSURE SWITCH. PRESSURE SWITCH. INSTRUMENTATION. ISE2 1/8INCH PT VERSION. .23307 lb. CA.

ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

Battery-less

LECSN-T1 LECSS-T1 Compliance No.

Electric Actuator/Slider Type

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Environment

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

HRX-OM-W002

If Option T is selected, Option T1 cannot be selected.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

15

L Speed: V [mm/s] Calculation example) T1 to T4 can be calculated as follows. a1 a2 Time [s] T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] T1 T2 T3 T4 L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration T2 = L : Stroke [mm] time can be obtained by the following equation. 200 0.5 300 (0.1 + 0.1) 300 (Operating condition) V : Speed

HRX-OM-X084

Change circulating fluid setting temperature.Set the pump output (option T1 only).

ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L Calculation example) T1 to T4 can be calculated as follows. Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Thermo-chiller/Rack Mount Type

Option symbol T1 Inverter Pump Mounted HRR010 20 T1 Inverter pump mounted Possible to choose an inverter pump in accordance with users piping resistance Cooling capacity will decrease by heat generated in the pump. The inverter pump does not use a mechanical seal. The 50 Hz and the 60 Hz inverter pumps have the same capacity.

ZP

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.