PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

L/min 0.5 to 0.5 L/min range 2 to 200 L/min 5 to 500 L/min 150 to 3000 L/min 0 to 1 L/min 0 to 3 L/min 1 to 1 L/min 3 to 3 L/min 10 to 1000 L/min 1 to 50 L/min 10 to 100 L/min 20 to 200 L/min 300 to 6000 L/min 2 to 100 L/min 600 to 12000 L/min Power supply voltage 24 VDCp10% 24 VDCp10% 12 to 24 VDCp10% 12 to 24 VDCp10% (25C reference) characteristics p3%F.S.(15 to 35oC) p2%F.S.

PFxx-OMO0004CN

, , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: Rc 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

2-Color Display Digital Pressure Switch Series ISE70/75/75H

1 Brown DC (+) 46 60 (31) (38.7) 3.5 35 OUT2 (NPN or PNP) 2 White 3 Blue DC () 24 OUT1 (NPN or PNP) 4 Black Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 6 726 Series ISE70/75/75H Specific Product Precautions 1 Be sure to read before handling.

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

() Blue DC () When used as an IO-Link device Brown L + L + Black C/Q Main circuit C/Q IO-Link master Gray NC White NC Blue L L 19 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series Dimensions ZSE20(F) ISE20 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order Piping specification M5 For 20 25

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B Dd9 H L C D d Part no.

Plate Cylinder

(mm) Dd9 m L d t l Part no.

MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B H Dd9 L C D d Part no.

High-Precision Digital Pressure Switch

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

MU

59 67 81 84 L 52.5 59 67 81 84 LD LU 13 14 17 23 23 ZZ 116 127 138 171 175 LA 35 41 46 62 62 ZZ Model MUl25 MUl32 MUl40 MUl50 MUl63 lLC 18 22 26 32 32 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 CD-MU02 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 Dimensions L, Z, and ZZ are reference dimensions for installing a single knuckle joint, which may be used as a guide.

Digital Flow Switch (Remote type sensor unit)

. -20No.PF-OMJ0016-J Specification Specifications Model PFM510 PFM525 PFM550 PFM511 Applicable fluid Dry air, N2, Ar, CO2 (air quality class to ISO8573-1 1.1.2 to 1.6.2) Dry air, N2, Ar 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min Rated flow range CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Accuracy 3%F.S. max. Repeatability 1%F.S. max.

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

PSxx-OMU0008CN

N02(L) F02(L) C01(L) A2(L) B2(L) R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D

Pressure Range: ISE77G (0 to 10 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)