Modular F.R.L. Unit ) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E
Conditions Body Ported Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T0806 x 1 m VF1120-01 Speed controller AS3002F-06 AS3002F-08 AN101-01 Silencer Tubing x Length T0604 x 1 m T1075 x 1 m VF3130-02 Speed controller AS3002F-06 AS4002F-10 AN110-01 Silencer T1075 x 1 m T1209 x 1 m Tubing x Length T0604 x 1 m VF5120-03 AS4002F-10 AS4002F-12 Speed
IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01
AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/surge voltage suppressor Manual override VQZ1000 2 position
2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch fitting for 6 C6 One-touch fitting
(mm) KQ2F04 to 12 Effective area (2) (mm2) Connection thread Rc (1) Mass (g) D1 D2 L1 L2 M Model Nylon Urethane Applicable tubing KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35
Pressure Range: 0 to 10 MPa, Piping: Rc 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -
Pressure Range: 0 to 10 MPa, Piping: Rc 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -
Pressure Range: 0 to 10 MPa, Piping: Rc 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE75[H], Operation Manual/Calibration Certificate: -
Pressure Range: 0 to 10 MPa, Piping: Rc 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket B, Operation Manual/Calibration Certificate: -
Pressure Range: 0 to 10 MPa, Piping: Rc 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: None, Operation Manual/Calibration Certificate: None
N.C. 0.2MPa Note 2) Note 3) Float type auto drain Spacer Pressure switch Note 5) Note 4) Note 5) T-interface Y21001 (02) Y310(01) 02 Y310(01) 02 Y410(02) 03 Y510(02) 03 Note 5) 02 03 04 01 02 VHS302 03 VHS2000VHS302 03 VHS40003-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E200E400E500-06 Note 5) Piping adapter Note 5) 01
Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01
With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit
] 65.1 VF 122 (GZ, GS: 123.4) [125.4] 120.4 (GZ, GS: 122.4) [122.4] G: 300 H: 600 Manual override (Non-locking) VFR 3-Rc(PT)1/4,1/8 (Lead wire length) (P, A, B port) VP7 41 54 60 [66.5] VP4 57.1 47.6 25.5 20 11.5 12 VQ 10 22 22 63 18 2-Rc(PT)1/4 (R1, R2 port) VQ4 [ ] for AC VQZ 3 4 5 01 02 3 4 5 01 02 M plug connector (M): SYJ7 40-lMllL plug connector (L): SYJ7 40-lLllVQD (Mounting holes
L1 M H (Width across flats) Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSl-M5E-02 2 5.8 15.8 20.3 11.9 AS12l1FSl-U10/32E-02 AS12l1FSl-M5E-23 3.2 7.2 17.2 21.7 13.3 16.9 39 36.5 35 33.5 13.6 15.1 5.5 9.6 7 AS12l1FSl-U10/32E-23 AS12l1FSl-M5E-04 4 8.2 AS12l1FSl-U10/32E-04 AS12l1FSl-M5E-06 6 10.4 18.6 23.1 16.5
(mm) L2 A D2 M Part No.
(mm)