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Subsonic flow at P1 + 0.1013 < 1.89(P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow of P1+0.1013 1.89(P2+0.1013) Q = 113S(P1 + 0.1013) Q : Air flow rate [l/min(ANR)] S : Effective area [mm2] P: Amount of pressure drop P1-P2[MPa] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] Correction for varying air temperatures: Square the coefficient indicated in the table below with the

/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type

Unit Series AC10A to 40A Dimensions AC10A/20A A N F E P K C G G IN OUT Q Q F.R.L.

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke H I Stroke H I 20 20 +10 3.6 +10 3.6 0 0 30 30 +1 1 +1 1 +20 +4.9 +6.4 +20 +4.9 +6.4 50 50 +25 +25 +40 +49.9 +51.4 +40 + 9.9 +51.4 13-11-110 New New Vacuum Pad More shapes and sizes of pads.

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P : Pressure drop (P1 P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures Multiply

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] P : Pressure difference [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 41 Series

(R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4 (A) 2 (B) 4 (A) 2 (B) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) 1 (P) r VQ1C01 4 (A) 2 (B) 5 (R1) 3 (R2) 1 (P) Component

cap P. 1672 e Waterproof cap P. 1672 i Cable with connector for output entry P. 1677 q Communication cable with connector P. 1671 w Power cable with connector (for SI unit) P. 1672 w Power cable with connector (for SI unit) P. 1672 o Power cable with connector P. 1677 q Communication cable with connector P. 1671 Connection example of the SI unit compliant with PROFIBUS DP Connection

Grease pack part no.: GR-S-010 (10 g) Basic Style (B) 20 P 20 25 Bore size Stroke P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 H1 Width across flats B1 32 to 40 H2 Width across flats KA P E (Head side pressure port) I G G NA D Q MM NN AL N ZZ + Stroke S + Stroke N F K H A P QY

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

P ZP3 P Vacuum Ejector or Pump and Number of Vacuum Pads ZP3E ZP3E Ejector and number of pads Vacuum pump and number of pads Vacuum line ZP2 ZP2V Tank ZP ZPT ZPR XT661 P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction

D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

In the case of liquid: P Q = 53Kv (9) G Q : Flow rate [L/min] Kv : Flow coefficient [m3/h] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 232Kv P(P2 + 0.1) (10) Q : Flow rate [kg/h] Kv : Flow coefficient [m3/h] P : Pressure difference [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 160 Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Applicable stroke table Manufacturable stroke range [mm] Stroke [mm] Model 30 50 100 150 200 250 300 350 400 450 500 P P P P P P P P P P P P P P P P P P P P P LEY16 LEY25 LEY32 P P P P P P 10 to 300 15 to 400 20 to 500 Consult with SMC for the manufacture of intermediate strokes other than those specified on the above. w For the servo motor (24 VDC) specification, EMC compliance was

+ l GB R H GA 2-Rc P 4-FD J MM Air release e D E BB FY Width across flats G Air release NA T FT NB l C 10 f K F SS + Q + l + Stroke S + Stroke MA B SS + Stroke A FX ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e FD J B BB C F GA GB NA NB P R S T FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 58 62 38 16 32 15 37 31 3/8 39 141 11 11 11