High Vacuum Angle Valve

11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

CQS

Cylinder stroke (mm) Cylinder stroke (mm) Bore size (mm) Bore size (mm) Symbol Specifications 5 5 10 10 -XA Change of rod end shape 12 12 29 (31) 37 (39) 36 (37) 44 (45) -XB10 Intermediate stroke (Using exclusive body) 16 16 39 (39) 49 (51) 48 (47) 58 (59) Piston rod and rod end nut made of stainless steel -XC6 20 20 63 (68) 94 (104) 76 (79) 107 (115) 25 25 92 (98) 130 (150) 108 (113) 146

MXS

, 100, 125, 150 *Refer to below table for parts No. of auto switch.

Cylinder with Lock

151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 150 175 40 56 41 23 12.5 25 37.5 50 75 100 125 150 175 200 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 76 61 29

MGG

, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50

ARM10/11

Inlet pressure (MPa) 14-4-56 39 Series ARM2500/3000 Manifold Regulator Modular Style Construction F.R.L.

ARM10/11

Inlet pressure (MPa) 14-4-56 39 Series ARM2500/3000 Manifold Regulator Modular Style Construction F.R.L.

Air Cylinder

25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

VQZ1000/2000/3000

or less 59 or less VQZ3321 0.62 0.33 2.4 0.66 0.30 2.7 Rubber seal 134 25 or less 33 or less 53 or less VQZ3420 0.54 0.19 2.4 0.54 0.19 2.3 Metal seal Exhaust center 3 position 30 or less 39 or less 59 or less VQZ3421 0.81 0.38 3.2 0.66 0.30 2.7 Rubber seal 25 or less 33 or less 53 or less VQZ3520 0.47 0.18 2.1 0.60 0.25 2.5 Metal seal Pressure center 30 or less 39 or less 59 or less VQZ3521

10

125 150 89 102 114 127 152 177 202 227 63 64 51 25 12.5 25 37.5 50 75 100 125 150 89 102 114 127 152 177 202 227 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 120 130 140 150 170 190 210 230

Table of Contents

Note) D1: Max. diameter M5 x 0.8 10.4 8 14 8 14 17 9.8 13.4 9.8 13.4 17.6 20.5 22 23.5 24.5 25 11 15.5 12.5 15.5 20 17 20 25.5 22 24.5 24.5 25.5 20 29.5 20 29.5 38.5 31 38.5 45.5 41 45.5 45.5 50 16 16 4 1 8 M5 x 0.8 25.5 16 25.5 32.5 27 32.5 39 35 39 39 42 D1 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 6 12.8 17 L3 L2 17.6 28.5 M5 x 0.8 17 15.2 8 18.5 D2 25.2 20.6 25.2 25.2 29.5 22 22 19

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

g g g 45 39 44 37 54 46 77 85 62 70 12 12 12 oz oz oz 1.59 1.38 1.55 1.31 1.90 1.62 2.72 3.00 2.19 2.47 g g g 59 51 58 49 71 60 102 112 81 91 16 16 16 oz oz oz 2.08 1.80 2.05 1.73 2.50 2.12 3.06 3.95 2.86 3.21 g g g 115 104 107 94 214 261 134 119 245 182 198 230 150 166 20 20 20 oz oz oz 4.06 3.67 3.77 3.32 7.55 9.21 4.73 4.20 8.64 6.42 6.98 8.11 5.29 5.86 g g g 165 150 146

Compact 5-Port Solenoid Valve

D-sub connector conforming to MIL-C-24308 (Refer to page 39.) Dedicated connector (Refer to page 39.) D-sub connector conforming to MIL-C-24308 (Refer to page 39.)

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

Environment

200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 LC3F2 Product weight [kg] Step motor 1.45 1.52 1.69 1.95 2.13 2.30 2.48 2.65 2.83 2.48 2.59 2.88 3.35 3.64 3.91 4.21 4.49 4.76 5.04 5.32 Servo motor 1.41 1.48 1.65 1.91 2.09 2.26 2.44 2.61 2.79 Weight: In-line Motor Type Model LEY25D LEY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500

REA/REB

High Precision Guide Type REAH Weights (kg) Model Standard stroke mm 150 200 300 400 500 600 800 1000 Max.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63