Cylinder with Lock

17 3 16 4 16 M10 x 1.25 27 27 1/8 143 3.5 6.5 237 40 6 14 22 3 16 4 16 M14 x 1.5 27 27 1/4 157 4.5 9 259 50 7 18 27 4 16 5 16 M18 x 1.5 31.5 31.5 1/4 172 4.5 10.5 288 63 7 18 27 4 16 5 16 M18 x 1.5 31.5 31.5 3/8 184 5.5 12 300 80 10 22 32 5 16 5 17 M22 x 1.5 38 38 3/8 227 7.5 14 371 100 10 26 41 5 16 5 17 M26 x 1.5 38 40 1/2 247 9.5 15 391 Bore size S ZZ 32 149 243 40 163 265 50 180 296 63

Series VQ Base Mounted Metal Seal/Rubber Seal

] (mm) Equation L1=10.5n+72 n: Station (Max. 16) L n 1 82.5 137.5 148 11 187.5 237.5 248 10 177 225 235.5 16 240 287.5 298 15 229.5 287.5 298 14 219 275 285.5 13 208.5 262.5 273 12 198 250 260.5 9 166.5 225 235.5 8 156 212.5 223 7 145.5 200 210.5 6 135 187.5 198 5 124.5 175 185.5 4 114 162.5 173 3 103.5 150 160.5 2 93 150 160.5 L1 L2 L3 Dimensions/Side entry connector [-PS] (mm) L n 11 262.5

CM2

CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

MNB

13 46 91 14 Up to 1000 50 11 120 9 1/4 65 75 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 135 9 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126 40 32 25 20 63 150 22 Up to 1000 100 16 178 1/4 14 116 114 37 4 54 189 16 89 120 19 150 40 41 30 20 75 170 26 Bore size (mm) T

MNB

13 46 91 14 Up to 1000 50 11 9 120 1/4 75 65 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 9 135 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126 40 32 25 20 63 150 22 Up to 1000 100 16 178 1/4 14 116 114 37 4 54 189 16 89 120 19 150 40 41 30 20 75 170 26 Bore size (mm) T

MXS

198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 Refer to "Dimensions" of MXS 16 on p.3.11-19 for one with shock absorber as symmetric.

MY1

PP 12 17 18.5 QQ 16 16 24 VV 16 19 23 TT 14.5 16 20 WW 12.5 16 19.5 UU 15 16 22 XX 28 32 36 SS 6 4 10.5 RR 16 23 27 Model MY1H25G MY1H32G MY1H40G "P" indicates cylinder supply ports.

Series SV

134 13.5 96 4 185.5 175 150 18 112 5 198 187.5 166 16 128 6 210.5 200 182 14.5 144 7 223 212.5 198 12.5 160 8 248 237.5 214 17 176 9 260.5 250 230 15.5 192 10 273 262.5 246 13.5 208 11 285.5 275 262 12 224 12 310.5 300 278 16.5 240 13 323 312.5 294 14.5 256 14 335.5 325 310 13 272 15 360.5 350 326 17.5 288 16 373 362.5 342 15.5 304 L1 L2 L3 L4 L5 20 EX500 Decentralized Serial Wiring Series

MXS Series Air Slide Table

16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16 on P. 60 for one with

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB 20 stations Without SI unit 32 16 32 16 32 16 32 16 32 16 32 16 32 16 For 16-output SI unit DeviceNet M12 i Mounting Symbol 02 Stations Note 2

Table of Contents

-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-45 16-2-28 16-2-36 16-2-48 16-1-4 16-1-5 4 Mechanical Pressure Switch Series Mechanical Pressure Switch Series Model Selection Table Positive Pressure Negative Pressure IS3000 IS1000 ISG11/ISG21 ZSM1 ISG19/ISG29 ISG13/ISG23 ISG12/ISG22 Model Fluid General pneumatic General pneumatic General fluids Calibration method Pressure adjusting

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

150 162.5 L3 69.5 153.5 80 90.5 101 111.5 122 132.5 143 L4 14 16 15 16 17 12 13 14 15 112 Body Ported 10-SY3000/5000/7000 Type 60 Dimensions [ ]: AC 10-SS5Y3-60Stations B Manual override L3 (L4) D side U side M5 x 0.8 (A, B port) 8 4.1 35 1 (3) 26 22.5 44.4 [46.6] 88.8 [93.2] 97.3 [101.7] 30.7 22.2 22.2 10.2 P P 5.5 B B A B B B B 4.7 R R A A A A A (Lead wire length) Approx. 300 DIN rail

SV

to 16 solenoids possible.)

0.4

16 32 16 32 16 32 16 M12 DeviceNet 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) VFS M12 PROFIBUS DP VFR D-sub Note 4) M12 CC-Link VQ7 M12 EtherCAT IP67 compliant

CXWM/CXWL

Bore size/Stroke (mm) 10 (25), 50, 75, 100 16 (25), 50, 75, 100, 125, 150, 175, 200 20 (25), 50, 75, 100, 125, 150, 175, 200 25 (25), 50, 75, 100, 125, 150, 175, 200 (25), (50), 75, 100, 125, 150, 175, 200 End lock 32 R End lock Note1) For the strokes indicated in the parentheses of the 10, 16 and 25, shock absorbers are to be mounted on both sides of the plate.

Table of Contents

Note 1) (1/8), (3/16), 1/4 Lock nut Locks the adjustment knob position.

JXCx-OMU0004

LEHZ 3 5mm/s LEHZ10 LEHZ16 LEHZ2025 LEHZ LEHZ 32 40 6 2(3) 6 3(4) 16 11 52 84 10 4 10 5.5 28 19.5 91 147 [N] 14 6 14 8 40 28 130 210 *LEHZ1016 30%F.S.LEHZ2025 25%F.S.LEHZ32 40 20%F.S. * (LEHZJ ) 53 No.JXC-OMU0004-A LEHF LEHF10 LEHF20 LEHF32 LEHF40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15

CL

21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) J K KA MM N S W P H ZZ e f h ZZ l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 M8 x 1.25 M8 x 1.25 M10 x

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150 133