SX

L2 L3 L4 2 stations 135.5 125 100 17.5 3 4 5 6 7 8 9 10 stations (Press and turn for the locking type.)

Electric Actuator/Slider Type

0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

Compact 5-Port Solenoid Valve

layout*2 8 8 stations * When not selecting an SI unit, the symbol will be nil.

Battery-less

8 @0 !0 !8 !4 u u !2 !3 i e !5 r t w q y !6 !

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

ZPT/ZPX

63 B10 63 M10 x 1.5 80 B12 80 M12 x 1.75 100 100 125 125 B01 Vacuum entry Pad type Rc 1/8 HB Large bellows pad Material N NBR S Silicon rubber U Urethane rubber F Fluoro rubber E EPR 13-11-91 10 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 Rc 1/8 I I Rc 1/8 Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 4-M4

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

+ Stroke 50 + Stroke 125 150 Rc 1/8 139 164 125 150 139 164 40 Rc 1/8 Rc 1/8 56.5 + Stroke 40.5 + Stroke 66.5 + Stroke 50.5 + Stroke 50 125.5 150.5 Rc 1/4 141.5 166.5 125.5 150.5 Rc 1/4 Rc 1/4 141.5 166.5 Note) External dimensions with rubber bumper are same as standard type as shown above.

Table of Contents

8 9.5 11 11 ZB 7.4 11.4 13.4 17.4 21.4 TB 8 8 10 10 12 YB 8 8 10 12 12 SC 7 7 8 8 8 WB 2 2 2 2.5 3 Q 11 12 14 17 20 VB 4 4 5 6 6 UB 10 10 12 16 16 ZA VA TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D

Secondary Batteries

(mm) Bracket assembly no. 1 4 6 1(P) 2(A) 4 3 8 8 1 8 90-VHK-B1A 6 8 6 1 4 90-VHK-B1A 8 6 3 8 90-VHK-B1A 8 11 Air Cylinder: Standard Type Double Acting, Single Rod 10, 16 90-CDJ2 Series How to Order Built-in Magnet Cylinder Model Bore size Suffix the symbol -B (Band mounting style) to the end of part number for cylinder with auto switch. 10 16 10 mm 16 mm 90-CDJ2B16-60-B Example Band

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

CS1

72 8 48 105 M30 X 1.5 30 47 53.1 46 18 44 M30 X 1.5 Y-16 40 32 80 8 55 110 M36 X 1.5 34 46 63.5 55 21 53 M36 X 1.5 Y-18 50 40 100 8 70 125 M40 X 1.5 54 42.5 69.3 60 23 57 M40 X 1.5 Y-20 50 40 100 8 70 125 M45 X 1.5 54 42.5 80.8 70 27 67 M45 X 1.5 Y-25 9 86 160 81 63 50 126 M56 X 2 53 98.1 85 34 82 M56 X 2 Y-30 9 175 87 M64 X 2 66 105 80 63 160 95 38 92 M64 X 2 110.0 Use a single knuckle

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

45 50 19 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 16 22 M16 x 1.5 30 26 3/8 5 43 112 11 10 9 50 63 21 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 16 25 M18 x 1.5 30 26 3/8 5 47 116 11 12 10 55 80 26 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 19 29 M22 x 1.5 35 30 1/2 5 57 127 11 16 13 65 100 34 38 6.5 118 90 35.5 35 27 19 16 M12 x 1.75 27 21 34 M27 x 2 35 32 1/2 8 66 137 12 20 16 80 125 34 38 6.5

Compact Cylinder Series NCQ8

250 300 350 400 NCDQ8BZ200-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ250-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4-3/8 4-7/8 5-3/8 #10-24UNC1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4-3/8 4-7/8 5-3/8 1/4-20UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2

V100

1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x

MNB

16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 90 10 25 110 115 120 95 2 (Different sides, same side) 120 125 130 15 105 25 100 (n 2) 2 25 + 55 (n 2) 2 100 + 55 (n 4) 2 120 + 55 (n 4) 2 (n 4) 2 125 + 55 (n 4) 2 130 + 55 (n 4) 2 D-F5NTL D-F59F 105 + 55 n = 4, 8, 12, 16 15 + 55 n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n =

MNB

4) 2 120 + 55 (n 4) 2 (n 4) 2 125 + 55 (n 4) 2 130 + 55 (n 4) 2 D-F5NTL D-F59F 105 + 55 n = 4, 8, 12, 16 15 + 55 n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 100 10 25 120 125 130 105 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different sides, same side), 1 95 100 15 80 85 90 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 100 + 40

Cylinder with Lock

)2 120 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 125 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 130 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 D-F5NT 1 100 105 120 125 130 2 (Different surfaces, same surface) 1 60 80 105 110 115 D-A5 D-A6 n (Same surface) 60 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 80 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 110 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 115 + 55 (n

CV/MVGQ

8 !

CV/MVGQ

8 !