ZP

Q ZP T 10 06 31.8 10 6 4.5 08 35.9 14 8 6 20 30 50 40 50 A14 06 19.9 12 6 3 08 24.9 14 8 Width across flats P N N Dimensions Per Vacuum Inlet: Barb Fitting Model N P Fitting part min. hole size Vacuum inlet direction q Pad dia.

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Triple, Type Of Connection: R, Connection screw: 1/4, Port A Number: 3, Color: Black, Release button color: Blue, Custom-made specifications: N/A

Triple, Type Of Connection: R, Connection screw: 3/8, Port A Number: 3, Color: Black, Release button color: Blue, Custom-made specifications: N/A

Applicable Tube OD 1: 06 (6mm), Applicable Tube OD 2: 10 (Same Dia.Ø10), Port Size: 03 (R(PT) 3/8)

Applicable Tube OD 1: 06 (6mm), Applicable Tube OD 2: 10 (Same Dia.Ø10), Port Size: 02 (R(PT)1/4)

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 Toggle lever VM1000-4N-08 VM1000-4NU-08 VM1100-4N-08 VM1100-4NU-08 Symbol/2 port 3 port Panel mounting hole (A) 2 (A) 2 12 12 10 10 Lock nut thick 2 Max. 5 1 (P) 1 (P) 3 (R) 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing VM1100-4N-08 VM1000-4N-08 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Table of Contents

10 stations For bottom ported: Rc 1/4, 3/8 only.

ZP

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

V

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

Series VQ Base Mounted Metal Seal/Rubber Seal

Example) Lead wire length 1000mm VQ1110N-5LO 3 pcs. AXT661-14AN-10 3 pcs.

Proposals for Energy Saving

KNL (mm) Model Nozzle size D Outside diameter L1 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

SQ1000/2000

When ordering with manifolds, add "-N" at the end of the manifold number. 1 2 3 4 5 6 7 8 ... n: Stations 53 Silencer cover Blanking plug (for One-touch fitting) L Dimensions 04 06 08 10 Applicable fitting size d 4 6 8 10 A Model A L D KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 This is inserted into the cylinder port and SUP and EXH ports that are not used.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Dimensions Applicable fitting size d 4 Model A L D 10-KQP-04 16 32 6 6 10-KQP-06 18 35 8 8 10-KQP-08 20.5 39 10 10 10-KQP-10 22 43 12 12 10-KQP-12 24 44.5 14 10-KQP-01 16 31.5 5 10-KQP-03 16 32 6 10-KQP-07 18 35 8.5 10-KQP-09 20.5 39 10 10-KQP-11 22 43 11.5 Series Part no 10-SY9000 SY9000-57-1A 1 8" 5 32" Cable assembly 1 4" AXT100-FC261 5 16" 3 to 3 8" Red Terminal no.

A

~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 26VDC or less 28VDC or less 24VDC (10~28VDC) 24VDC (10~28VDC) Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/3 Wire (NPN) Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/2 Wire Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/4