Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

Compact Manifold Regulator

0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 200 150

ARM10/11

Option Metric size Inch size Nonrelieving 0.35 MPa IN side Bottom OUT side Symbol None Oil-free Symbol setting Note 1) Top Top IN side IN side Straight Elbow Straight Elbow OUT side Straight Elbow Straight Elbow OUT side Bottom Nil 1 2 3 4 5 6 7 1 2 3 4 Symbol Symbol 4 5/32 6 1/4 6 1/4 4 5/32 6 1/4 6 1/4 4 5/32 4 5/32 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

ARM10/11

Option Metric size Inch size Nonrelieving 0.35 MPa IN side Bottom OUT side Symbol None Oil-free Symbol setting Note 1) Top Top IN side IN side Straight Elbow Straight Elbow OUT side Straight Elbow Straight Elbow OUT side Bottom Nil 1 2 3 4 5 6 7 1 2 3 4 Symbol Symbol 4 5/32 6 1/4 6 1/4 4 5/32 6 1/4 6 1/4 4 5/32 4 5/32 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

Compact 5-Port Solenoid Valve

4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

130 100 35.9 170 220 4 x M12 x 1.75 22 80 (3B) 0 209 62 285 147 70 45 5.2 86 105 2 x M8 x 1.25 14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 20 (3/4B) 0 250 73 330 177 100 56 9.7 108 145 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 100 56 12.8 108 150 4 x M12 x 1.75 22 40 (1 1/2B) 50 (2B) 0 60 450 94 545

VFR

(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust

CV/MVGQ

) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8

CV/MVGQ

110 + 50 (n 2) n = 2, 4, 6, 8 Same side 15 90 100 110 35 100 100 110 100 1 Different sides 2 Same side 100 100 110 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 100 100 110 90 100

0.4

SV SYJ (L4) (5.25) (L3) SZ L1 L2 VF 100 6.5 34.5 P = 16 1 0.9 Indicator light Manual override VP4 13.2 (12) VQ 1/2 VQ 1/2 2B 2A 2 3B 3A 3 4B 4A 4 1B 1A 1 VQ 4/5 (35) (5.5) 31.6 6.2 120 <126.9> 125 49 VQC 1/2 80 46.2 10.6 4 VQC 4/5 VQZ SQ 78.2 4 x M5 mounting hole VFS n Stations 8 7 6 5 4 3 2 1 D side U side VFR DIN rail clamp screw C10 [3(R) EXH port] C10: 10 One-touch fitting 2 x G 3/4 Electrical

CL

range (mm) A Bore (mm) 40 50 63 80 100 BF AL B B1 BN BQ C FD FT FY GA GB BP D FX FZ GC E GD FV GL GR H1 W/o rod boot to 500 to 600 to 600 to 750 to 750 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 22 27 27 32 41 100 110 130 160 180 8 11 11 13 16 71 81 101 119 133 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 96 108 115 129 140 44

Compact

Lead wire should be less than 100 meters. 4.

AS-FG/ASD-FG

of 0.5MPa and a temperature of 20C. 7 Series AS-FG How to Order AS 200 1 F G 06 Body size Applicable tube outside diameter Metric size Inch size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 With One-touch fitting Use a 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AQ ASV Flow Rate and Sonic Conductance AK AS1001FG AS2001FG AS2051FG AS3001FG AS4001FG Model VCHC 3.2 6 8 10 12 4 6 6 8 10 ASR ASQ Metric size 4 12 Tubing 6 Flow Direction Symbols on Body O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" Indication symbol Symbol Inch size 5/32" 1/4" 5/16" 3/16" Flow rate (L/min (ANR)) 100 130 230 290 460 420 660 920 1050 1390 Controlled flow Free

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

4 Pneumatic CQ2B32-PS CQ2BH50-PS 32 50 !2, !3, !4 CQ2B40-PS CQ2BH63-PS 40 63 CQ2B50-PS CQ2BH80-PS 50 80 CQ2B63-PS CQ2BH100-PS 63 100 Seal kit includes !2 !3 !4 Order the seal kit, based on each bore size. CQ2B80-PS 80 CQ2B100-PS 100 Auto Switch Mounting Bracket Part No.

CQ2

(mm) 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 O N M I E L A H D F J K P Q S U W Z B C M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 M16 X 2.0 M20 X 2.5 10.5 10 13 13 16 9 Depth 7 9 Depth 7 11 Depth 8 5.5 5.5 6.6 9 11 11 34 40 50 60 77 94 45 52 64 77 98 117 7 7 8 8 10 12 40 17 17 22 22 26 26 8 8 10 10 33 13 13 15 15 21 27 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

4 Pneumatic CQ2B32-PS CQ2BH50-PS 32 50 !2, !3, !4 CQ2B40-PS CQ2BH63-PS 40 63 CQ2B50-PS CQ2BH80-PS 50 80 CQ2B63-PS CQ2BH100-PS 63 100 Seal kit includes !2 !3 !4 Order the seal kit, based on each bore size. CQ2B80-PS 80 CQ2B100-PS 100 Auto Switch Mounting Bracket Part No.