Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Number of stations Nil F N T Rc G NPT NPTF P port 1/8 03 3 stations : : R port 1/8 Applicable blanking plate assembly SYJ5000-21-3A 12 12 stations How to Order 10 SS5YJ5 43P 05 C4 Type 43P (5 port / base mounted) Applicable connector assembly Refer to page 526.

Series SV

Flat Ribbon Cable Single Valve Sub-plate D-sub Connector EX250 EX120 Circular Connector EX500 Valve Manifold Common Specifications 1/4, 3/8 threaded type port block assembly part numbers For A, B port SY9000 58A 02 03 B 2 For P, E port SY9000 58B 03 A 4 Clip Thread type Rc G NPT NPTF Nil F N T P B B B B Note 1) Be careful to avoid damage or contamination of O-rings, as this can cause

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

reduces flow setting time

5/32" 8.2 AS12l1FSl-U10/32E-03 AS12l1FSl-M5E-07 1/4" 11.2 18.6 23.1 16.5 8 AS12l1FSl-U10/32E-07 M5 x 0.8 10/32UNF 8 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation 592 Speed Controller with Indicator AS-FS Series Dimensions: Universal Type Seal method: Gasket seal For M5, 10-32UNF W1 Applicable tubing O.D. d Y AS-F AS-F D3 D1 TMH ASD M L3 L4 AS L5

VQ4000

VQD External pilot specifications How to Order Single Valves (Example) VQ4100 T 5 03 Thread type (P, R and A, B port) Cylinder port Port size Nil N T F Rc NPT NPTF G External pilot port 2-Rc 1/8 External pilot port Rc 1/8 How to Order Manifold Note) Possible to mix mounting of internal and external pilot VV5Q41 T 08 03 FU1 Pressure Specifications Valve construction

S Couplers Series KKA

Body size Body size Port size Port size KKA3 S-01 F KKA3 P-01 F Rc1 / 8 Rc1 / 8 KKA3 S-02F 1 / 8 1 / 8 KKA3 P-02F Rc1 / 4 Rc1 / 4 KKA3 S-03 F KKA3 P-03 F Rc3 / 8 Rc3 / 8 KKA4 S-02F KKA4 P-02F Rc1 / 4 Rc1 / 4 KKA4 S-03 F 1 / 4 KKA4 P-03 F 1 / 4 Rc3 / 8 Rc3 / 8 KKA4 S-04 F KKA4 P-04 F Rc1 / 2 Rc1 / 2 KKA6S-03 F KKA6P-03 F Rc3 / 8 Rc3 / 8 KKA6S-04 F KKA6P-04 F 1 / 2 Rc1 / 2 Rc1 / 2 1 / 2 KKA6S

Table of Contents

Fixed 4% F .S.

Compressed Air Preparation Filter

Combination example q A Spacer with bracket F S 2 x P (Port size) J M Line Filter AFF30-03-D 1 pc. Mist Separator AM30-03-D 1 pc. Spacer with Bracket Y300T-D 1 pc. R V1 V2 Q1 Q21 Q1 C Y300T-D U G Maintenance space E AFF30-03-D AM30-03-D 1 Q2 (Sizes 20, 40) Q1 (Size 30) Combination example w A Spacer with bracket N F 2 x P (Port size) J M S Mist Separator AM30-03-D 1 pc.

LEC-OM02704CN

6][0] 14.5.5 8 [6][1] (4) ([8][2]) [8][2] [2][0] 1EA5 4 (5) ([8][2]) [8][2] [0][0] 1EA5 4 (6) ([C][0]) [C][0] [0][1][F][F] 9 8 (16)10 9 14 15 14 (7) ([C][6]) [C][6] [0][1][F][F] 0 8 (16)10 (8) ([C][7]) [C][7] [0][1][F][F] 020 8 (16)10 (9) ([C][8]) [C][8] [0][1][F][F] 020 8 (16)10 (10)(DWELL)([C][A]) [C][A] [0][1][F][F] (DWELL) 020 8 (16)10 (11)([C][B]) [C][B] [0][1][F][F] 03

High Purity Fluoropolymer

M M H W Y L E 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size 18.5 35 1/8" 16.5 14 14 15 (L) 21.5 36.5

CG5-S

(mm) Connection threads Model Connection threads Model M5 x 0.8 KGH04-M5 -01 -02 KGH06-M5 -01 -02 -03 KGH08-01 -02 -03 KGH10-01 -02 -03 -04 KGH12-02 -03 -04 KGH16-03 -04 M5 x 0.8 KGL04-M5 -01 -02 KGL06-M5 -01 -02 -03 KGL08-01 -02 -03 KGL10-01 -02 -03 -04 KGL12-02 -03 -04 KGL16-03 -04 4 4 R 1/8 R 1/4 R 1/8 R 1/4 M5 x 0.8 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

CQ2

(A type, B type) Bore size (mm) T2 B D E F M T1 Part No. 6.5 10 18 6.8 16 6 42 YA-03 32, 40 YA 03 6.5 12 20 9 20 8 50 YA-05 50, 63 8.5 16 26 11 25 10 62 YA-08 80 Applicable bore size 10.5 18 31 14 30 12 76 YA-10 100 For 32, 40 For 50, 63 For 80 For 100 03 05 08 10 Mounting bracket Weight (g) Bore size (mm) K L M Part No.

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

Modular Type Filter Regulator Series AW

BG 30 AW F 2 N X430 03 BG 30 AW F 2 N X425 Filter regulator Filter regulator For high/low temperature For high pressure Body size 30 40 Body size X430 X440 Low temperature 20 30 40 High temperature Thread type Thread type Nil N Note 1) Rc NPT G Nil N Note 1) Rc NPT G Port size Port size F Note 2) F Note 2) Body size Symbol Body size Port size Port size Note 1) Drain guide is NPT1/4 (applicable

VS 8-2/VS 8-4

9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification