Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.9 34.9 18.5 15 17 8 R 1/4 ASD430FG-02-08S 28.2 18.5 55 46.5 15.2 34.4 29.4 11 19.7 10 21 31 58 ASD430FG-02-10S 49.3 18.5 17 25.2 74 6 ASD530FG-02-06S 48.3 12.8 20.3 18.5 28.2 76 8 ASD530FG-02-08S 51.3 15.2 46.9 41.9 48.3 43.3 23 19.8 19 R 1/4 42.8 37.8 15.4 21 80 32.6 10 ASD530FG-02-10S 54.1 18.5 23.1 22 83 34.4 55.9 12 ASD530FG-02-12S 20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5

4/5 Port Solenoid Valve

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200 100 Perpendicular, upward actuation

AS-FG/ASD-FG

) 1/4 28.2 46.5 34.4 11 29.4 15.2 18.5 ASD430FG-02-08S 10 31 19.7 49.3 18.5 21 ASD430FG-02-10S 6 25.2 48.3 12.8 17 ASD530FG-02-06S 20.3 28.2 8 51.3 15.2 18.5 ASD530FG-02-08S 23 19.8 46.9 41.9 48.8 43.8 19 R(PT) 1/4 42.8 15.4 37.8 32.6 10 54.1 18.5 21 ASD530FG-02-10S 23.1 34.4 12 55.9 20.9 22 ASD530FG-02-12S 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23

5 Port Solenoid Valve Series SV1000/2000/3000/4000

AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details regarding different conditions

Secondary Batteries

How to Order 90-ZPTSeries With buffer ZPT A8 U 06 K F 6 B5 90 Vacuum Equipment Mounting thread diameter/ Male thread Series compatible with secondary batteries A8 M8 x 1 90 Material restriction Vacuum entry port Pad diameter (mm) B5 M5 x 0.8 06 6 Buffer stroke Pad type 6 6 mm U Flat Buffer type K Non-rotating Material F Fluororubber *Specifications and dimensions for the 90-series are the

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

VEX1

DXT170-176-2-01 DXT170-176-2-02 100 V 200 V 100 VAC 200 VAC Lead wire length Symbol Lead wire length (L mm) DXT170-176-2-03 110 V 110 VAC DXT170-176-2-04 220 V 220 VAC Nil 300 240 V 6 VD 12 VD 24 VD 48 VD DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 6 10 15 20 25 30 600 6 VDC 12 VDC 24 VDC 48 VDC 1000 1500 2000 2500 3000 Connector with light circuit

ZP

rubber N S U F GN GS 02 03 04 06 B08 2 3 4 6 8 Blast type: Work pieces can be removed easily.

ZP

Material ZQ Series ZPY Without buffer ZPY U N 02 N4 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.) Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

Table of Contents

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

VQZ1000/2000/3000

448 34 485.5 37 473 36 39 498 38 40 L dimension 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 3.2 31.5 16 Color: White 6 32 16 8 35 18 10 39 20.5 12 43 22 Silencer (For EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions

Dual Speed Controller with One-touch Fitting Series ASD

13.7 ASD330F-01-06SD 38.9 22.9 11.6 38.5 14 6 13.7 35.6 1.2 14.2 11.8 7.2 12 R 1/8 31.6 10.6 ASD330F-01-08SD 38.2 28.2 15.2 44.8 15.8 8 18.5 ASD430F-02-06SD 25.2 12.8 43.5 6 17 18 ASD430F-02-08SD 41.7 40.7 1.2 28.2 18.5 15 7.2 17 15.2 46.5 8 R 1/4 34.7 11 18.5 ASD430F-02-10SD 31 18.5 49.3 19.7 10 21 ASD530F-02-06SD 25.2 12.8 48.3 6 17 20.3 ASD530F-02-08SD 28.2 15.2 51.3 8 18.5 53.7 55.3 1.2

One-touch Fittings

. port size Weight [g] a b 4 6 KQ2N04-06 38 13.3 13.3 2.5 2 6 8 KQ2N06-08 42 14.2 13.3 4 2 8 10 KQ2N08-10 47 15.6 14.2 6 2 10 12 KQ2N10-12 51 17 15.6 7.5 3.1 12 16 KQ2N12-16 55 20.6 17 9 4.9 Applicable fitting a Color Cap: KQ2C Applicable tubing O.D.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Control type 04 06 4 6 Port size 0 1 Meter-out Meter-in M3 M5 01 02 M3 x 0.5 M5 x 0.8 R 1/8 R 1/4 With One-touch fitting Fixed orifice Applicable model AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS221F-01-04 AS221F-01-06 AS221F-02-06 Symbol Fixed orifice 1 2 3 4 5 6 7 8 9 10 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 The graph below shows the relationship between orifices for each cylinder bore

A

4, 6 S Y M B O L S Primary pressure Bar Flow ln/min H O W T O O R D E R M I N I AT U R E R E G U L AT O R (N)ARJ1020F (N)ARJ1020F M5 D I M E N S I O N S S E R I E S NARJ 04 4mm 06 6mm Japanese N North American M5 M5X0.8 Panel Mount Dimension Model A B C D E F G H J NARJ1020F-M5-04 21 10.4 4 M5X0.8 6 10.6 3.5 15.5 50 NARJ1020F-M5-06 22 12.8 6 Courtesy of Steven Engineering, Inc. !

Magnetically Coupled Rodless Cylinder

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

KQ2

M5 M6 01 02 03 04 00 04 06 08 10 12 16 99 M5 x 0.8 M6 x 1.0 3.2 4 6 8 10 12 16 4 6 8 10 12 16 Thread connection Tubing (Rod) connection 23 04 06 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 R , Rc R , Rc R , Rc R , Rc 08 10 12 16 Same dia. tubing (Reducer) Different dia. tubing Same dia. rod Model Male connector Hexagon socket head universal male elbow Universal male elbow 45 male elbow Branch union elbow