33

2 Operation display panel 5005 mm 21 mm Circulating fluid return port Rc1/2 3775 mm Handle (Same for the opposite side) Power cable (3 m) with plug Fluid level indicator Model no. label 6155 mm 5805 mm 100 VAC 200 VAC 1235 mm 3485 mm Power cable Note) Dustproof filter Caster (unfixed) with locking lever Caster (unfixed) 1055 mm Drain port with O-ring sealing plug (The conversion fitting R3

Exhaust Cleaner for Vacuum Pump AMV Series

/8 AMV15, AMV37: R1/2 AMV75, AMV160: R3/4 Replacement Parts AMV3 AMV6 AMV15 AMV75 1 AMV37 AMV160 2 No Description Material Part no.

FGE-C

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 66h9 0 -0.074 33.3 opened +2.5 -0.2 10 0 -0.1 12 0 -0.06 M5 x 0.8 Finger closing port 4-M5 x 0.8 (attachment mounting screw ) 19.3 closed 0 -0.8 6 12 25 30.4 Max. 14 4-M8 x 1.25 depth 12 (two on opposite side) 63 24 M5 x 0.8 Finger opening port 3-R3 2

MRHQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 66h9 0 -0.074 33.3 opened +2.5 -0.2 10 0 -0.1 12 0 -0.06 M5 x 0.8 Finger closing port 4-M5 x 0.8 (attachment mounting screw ) 19.3 closed 0 -0.8 6 12 25 30.4 Max. 14 4-M8 x 1.25 depth 12 (two on opposite side) 63 24 M5 x 0.8 Finger opening port 3-R3 2

Low torque Metal seal type Rotary joint

R3 3 (29) 32 ( 35) 29 5 37 (45) 5 MQR8-F MQR12-F 4-6 counter bore 5 4-3.2 through P.C.D.48 4-8 counter bore 5.5 4-4.5 through32 drill through 4-4.5 through 2-4.2 through 3 *at 2 points 27 drill through 45 25 R4 R4 45 3.5 (43) 41 5 (55) 7 45 ( 50) 46.5 4 Series MQR Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Rotary Gripper Series MRHQ

2 4 Finger opening port 17 32 23 27.5 7 11 45 42 69 8 54 2-8.5 through 2-14 depth of counter bore 14 107 Angle adjustment bolt 3-R3 12 3-6H9 depth 8 (one each on three sides) +0.030 0 10 3-6H9 long groove depth 4 (one each on three sides) +0.030 0 M5 x 0.8 Port B M5 x 0.8 Port A 50h9 0 0.062 4-M6 x 1 Depth 10 I N J E A D P A A M N R SMC R E O P 17 P T 21.5 27.5 A I R R G Y 7 R A I 8 17.5

Pressure valve/Series ASR Flow valve/Series ASQ

Port size 6 8 10 12 Flow valve Pressure valve ASR4 3 0F02 ASR53 0F02 ASR53 0F03 ASR6 3 0F03 ASR6 3 0F04 ASQ4 3 0F02 ASQ53 0F02 ASQ53 0F03 ASQ6 3 0F03 ASQ6 3 0F04 R1/4 R1/4 R3 /8 R3 /8 R1/2

S Couplers Series KKH

Male thread type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7 25.4 1/4 KKH4S-03MS R3

IDX-OM-W053

Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 12-4 1. (1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4. GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

The LEF series slider type electric actuator features a low profile height of 46mm *. The actuators main body can be mounted without removing any exterior components, such as the cover, making installation easy. The standard equipped seal band covers the guide, ball screw and belt, preventing grease and external foreign matter from splashing and entering the LEF. There are 2 types of drivers

The LEF series slider type electric actuator features a low profile height of 46mm *. The actuators main body can be mounted without removing any exterior components, such as the cover, making installation easy. The standard equipped seal band covers the guide, ball screw and belt, preventing grease and external foreign matter from splashing and entering the LEF. There are 2 types of drivers

The LEF series slider type electric actuator features a low profile height of 46mm *. The actuators main body can be mounted without removing any exterior components, such as the cover, making installation easy. The standard equipped seal band covers the guide, ball screw and belt, preventing grease and external foreign matter from splashing and entering the LEF. There are 2 types of drivers

Series: LEFB, Size: 32, Motor Type: Battery-less absolute, 24VDC, Step, Lead: 48mm, Stroke: 1200mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: w/o, Roller Specification, Positioning Pin Hole: -, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -, Communication Plug Connector: -

Series: LEFB, Size: 32, Motor Type: Battery-less absolute, 24VDC, Step, Lead: 48mm, Stroke: 500mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: w/o, Roller Specification, Positioning Pin Hole: -, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -, Communication Plug Connector: -

Series: LEFB, Size: 32, Motor Type: Battery-less absolute, 24VDC, Step, Lead: 48mm, Stroke: 1000mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Body Bottom 2 Locations, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -, Communication Plug Connector: -

Series: LEFB, Size: 32, Motor Type: Battery-less absolute, 24VDC, Step, Lead: 48mm, Stroke: 1200mm, Motor Option: -, Auto Switch Compatibility: -, Grease Application: -, Positioning Pin Hole: -, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -, Communication Plug Connector: -

Series: LEFB, Size: 32, Motor Type: Battery-less absolute, 24VDC, Step, Lead: 48mm, Stroke: 2000mm, Motor Option: -, Auto Switch Compatibility: -, Grease Application: -, Positioning Pin Hole: -, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -, Communication Plug Connector: -