Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

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Thermo-chiller/Rack Mount Type

Maximum load current 500 mA AC/DC (Resistance load) Contact output signal 1, 2, 3 Minimum load current 5 VDC 10 mA 24 VDC Output voltage 24 VDC 10% 500 mA MAX1 (No inductive load) 1 When using the power supply of this product, make sure that the total load current is 500 mA or less. Contact Input/Output Pin Nos. Pin no.

AC Servo Motor Driver (Pulse input type/Positioning type)

speed limit 6 [Applied] 500 r/min PC34 SC7 Internal speed limit 7 [Applied] 800 r/min 17 - 4.5 Positioning mode (1) [Basic settings parameters (No.PA)] No.

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E d R f j Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J 2 x M depth 5 A G H B1 B b 2 x P Port size i DS: DIN terminal DZ: DIN terminal with light 70 CS: Conduit 58.3 51.9 500 R R DN: DIN terminal without connector WN: WN: M12 connector without cable 44.1 34.3 R R [mm] Size Port size P A B B1 C E G H J M 30 1/4, 3/8 21 <22> 57 28.5 89.8 10.5

CY1

10 100, 200, 300 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

3 Port Air Operated Valve

/N.O. 2(A) 3/8 1/2 15.3 Air operated valve (P)1 3(R) VPA300 N.C. 2(A) 1/8 1/4 3.8 (P)1 3(R) N.O. 2(A) VPA500 (P)1 3(R) 1/4 3/8 P. 1564 8.8 For vacuum N.C. 2(A) VPA700 (P)1 3(R) 3/8 1/2 N.O. 15.0 2(A) (P)1 3(R) 1556 VPA300/500/700 Series Model Selection by Operating Conditions w Air Operated Valve: Manifold Series Manifold base model Applicable stations Note) EXH port type SYA VV3PA3-41 SYJA

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 1.5 MPa 2 outputs (NPN/PNP) Output specification 1 output (NPN/PNP) Analog (Voltage/Current) Enclosure IP40 IP40 Piping M5 female thread, R1/8, NPT1/8 Note Copy function, Auto-shift function CONTENTS 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series How to Order p. 9 Specifications p. 10 Set Pressure Range and Rated Pressure

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH spacer) 300 (PE port) VFR (PE port) Applicable cable O.D. 2.3 to 2.8 (PE port) (Lead wire length) (PE port) Applicable cable O.D.

CV/MVGQ

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CV/MVGQ

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Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

SYJ3000/5000/7000

port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 1-5-17.

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Modular Design with Uniform Body Style

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Compact

LEMB25 LEMB32 0 2 4 6 8 10 12 14 16 18 20 22 12 Combining with external guide 10 Combining with external guide Work load [kg] Work load [kg] 8 6 External guide unused External guide unused 4 2 0 0 500 1000 1000 500 0 Speed [mm/s] Speed [mm/s] LEMC25 LEMC32 0 2 4 6 8 10 12 14 16 18 20 22 12 10 Work load [kg] Work load [kg] 8 6 4 2 0 0 500 1000 0 500 1000 Speed [mm/s] Speed [mm/s] LEMH/HT25

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

Hydraulic

B-series rod A 13.5 14.5 Piston seals are NBR for both types R and V.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

660 320 500 660 500 660 500 660 500 660 500 660 7.9 0.33 3.0 1 4 (8A) 15 0.61 4.5 4.5 15 0.61 3.0 1 4 (8A) 6 1.1 6 26 26 1.1 3 1.6 8 38 7.9 0.33 1.0 3 8 (10) 4.5 1.9 10 46 15 0.61 6 0.33 3 7.9 26 1.1 Note) Weight of grommet type.